Magnesium doped semipolar (11-22) p-type gallium nitride: Impact of dopant concentration variants towards grain size distributions and crystalline quality
The effect of biscyclopentadienyl magnesium flow rate for the growth of p-type gallium nitride thin films was varied from 20 to 40 standard cubic centimeter per minute to acquire the optimum doping concentration level. The growth of semi-polar (11-22) p-type gallium nitride thin films on m-plane sap...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
Elsevier
2022
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/33680/ |
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