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Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing

We report the fabrication of a novel multimodal biosensor combining plasmonic and electrochemical detection. The plasmonic sensors are based on monitoring the propagation of Bloch long-range surface plasmon polaritons (LRSPPs) along thin narrow Au stripes, integrating grating couplers as input/outpu...

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محفوظ في:
التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Khodami, Maryam, Hirbodvash, Zohreh, Krupin, Oleksiy, Wong, Wei Ru, Lisicka-Skrzek, Ewa, Northfield, Howard, Hahn, Choloong, Berini, Pierre
التنسيق: مقال
منشور في: 2021
الموضوعات:
QC Physics
TA Engineering (General). Civil engineering (General)
الوصول للمادة أونلاين:http://eprints.um.edu.my/26276/
https://doi.org/10.1109/JMEMS.2021.3097701
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id my.um.eprints.26276
record_format eprints
spelling my.um.eprints.262762022-02-18T03:37:39Z http://eprints.um.edu.my/26276/ Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing Khodami, Maryam Hirbodvash, Zohreh Krupin, Oleksiy Wong, Wei Ru Lisicka-Skrzek, Ewa Northfield, Howard Hahn, Choloong Berini, Pierre QC Physics TA Engineering (General). Civil engineering (General) We report the fabrication of a novel multimodal biosensor combining plasmonic and electrochemical detection. The plasmonic sensors are based on monitoring the propagation of Bloch long-range surface plasmon polaritons (LRSPPs) along thin narrow Au stripes, integrating grating couplers as input/output means. The electrochemical sensors use the same Au stripes as working electrodes with nearby Pt stripes integrated on-chip as counter electrodes. The structures are fabricated on a truncated 1D photonic crystal comprised of a 15-period stack of alternating layers of SiO2/Ta2O5. The Au and Pt stripes are fabricated using bilayer lift-off photolithography, and the gratings are fabricated using e-beam lithography. The structures are arranged into arrays targeting multichannel biosensing. The wafer is covered with CYTOP as the upper cladding with etched microfluidic channels providing access to the sensing surfaces and is wafer-bonded to a Borofloat silica wafer to encapsulate the fluidic channels and enable edge (in-plane) fluidic interfacing. The wavelength response of the grating-coupled plasmonic waveguide sensors is presented along with surface sensing results. Cyclic voltammetry measurements using the Au and Pt stripes as the working and counter electrodes are also presented. [2021-0103] 2021-10 Article PeerReviewed Khodami, Maryam and Hirbodvash, Zohreh and Krupin, Oleksiy and Wong, Wei Ru and Lisicka-Skrzek, Ewa and Northfield, Howard and Hahn, Choloong and Berini, Pierre (2021) Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing. Journal of Microelectromechanical Systems, 30 (5). pp. 686-695. ISSN 1057-7157, DOI https://doi.org/10.1109/JMEMS.2021.3097701 <https://doi.org/10.1109/JMEMS.2021.3097701>. https://doi.org/10.1109/JMEMS.2021.3097701 doi:10.1109/JMEMS.2021.3097701
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic QC Physics
TA Engineering (General). Civil engineering (General)
spellingShingle QC Physics
TA Engineering (General). Civil engineering (General)
Khodami, Maryam
Hirbodvash, Zohreh
Krupin, Oleksiy
Wong, Wei Ru
Lisicka-Skrzek, Ewa
Northfield, Howard
Hahn, Choloong
Berini, Pierre
Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
description We report the fabrication of a novel multimodal biosensor combining plasmonic and electrochemical detection. The plasmonic sensors are based on monitoring the propagation of Bloch long-range surface plasmon polaritons (LRSPPs) along thin narrow Au stripes, integrating grating couplers as input/output means. The electrochemical sensors use the same Au stripes as working electrodes with nearby Pt stripes integrated on-chip as counter electrodes. The structures are fabricated on a truncated 1D photonic crystal comprised of a 15-period stack of alternating layers of SiO2/Ta2O5. The Au and Pt stripes are fabricated using bilayer lift-off photolithography, and the gratings are fabricated using e-beam lithography. The structures are arranged into arrays targeting multichannel biosensing. The wafer is covered with CYTOP as the upper cladding with etched microfluidic channels providing access to the sensing surfaces and is wafer-bonded to a Borofloat silica wafer to encapsulate the fluidic channels and enable edge (in-plane) fluidic interfacing. The wavelength response of the grating-coupled plasmonic waveguide sensors is presented along with surface sensing results. Cyclic voltammetry measurements using the Au and Pt stripes as the working and counter electrodes are also presented. [2021-0103]
format Article
author Khodami, Maryam
Hirbodvash, Zohreh
Krupin, Oleksiy
Wong, Wei Ru
Lisicka-Skrzek, Ewa
Northfield, Howard
Hahn, Choloong
Berini, Pierre
author_facet Khodami, Maryam
Hirbodvash, Zohreh
Krupin, Oleksiy
Wong, Wei Ru
Lisicka-Skrzek, Ewa
Northfield, Howard
Hahn, Choloong
Berini, Pierre
author_sort Khodami, Maryam
title Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
title_short Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
title_full Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
title_fullStr Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
title_full_unstemmed Fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
title_sort fabrication of bloch long range surface plasmon waveguides integrating counter electrodes and microfluidic channels for multimodal biosensing
publishDate 2021
url http://eprints.um.edu.my/26276/
https://doi.org/10.1109/JMEMS.2021.3097701
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