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Integrating microsphere resonator and ZnO nanorods coated glass for humidity sensing application

A humidity sensor is proposed by integrating a microsphere resonator onto ZnO nanorods coated glass surface. The glass substrate was coated with ZnO nanorods for 12 h using the hydrothermal method and the microsphere was set at a diameter of 234 mu m. The proposed sensor produced sensitivity of 0.07...

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Bibliographic Details
Main Authors: Jali, Mohd Hafiz, Rahim, Hazli Rafis Abdul, Johari, Md Ashadi Md, Ahmad, Aminah, Yusof, Haziezol Helmi Mohd, Johari, Siti Halma, Baharom, Mohamad Faizal, Thokchom, Siddharth, Dimyati, Kaharudin, Harun, Sulaiman Wadi
Format: Article
Published: 2021
Subjects:
QC Physics
Online Access:http://eprints.um.edu.my/26261/
https://doi.org/10.1016/j.optlastec.2021.107356
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