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Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

Classical dual-frequency capacitively coupled plasmas (2f CCPs) operating at low pressures and significantly different frequencies are often used for a variety of applications in semiconductor manufacturing in order to control the mean ion energy at the electrodes separately from the ion flux. Howev...

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Main Authors:	Saikia, Partha, Bhuyan, Heman, Yap, Seong Ling, Escalona, Miguel, Favre, Mario, Wyndham, Edmund, Schulze, Julian
Format:	Article
Published:	AIP Publishing 2019
Subjects:	Q Science (General) QC Physics
Online Access:	http://eprints.um.edu.my/23578/ https://doi.org/10.1063/1.5094603
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spelling	my.um.eprints.235782020-01-24T02:47:54Z http://eprints.um.edu.my/23578/ Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas Saikia, Partha Bhuyan, Heman Yap, Seong Ling Escalona, Miguel Favre, Mario Wyndham, Edmund Schulze, Julian Q Science (General) QC Physics Classical dual-frequency capacitively coupled plasmas (2f CCPs) operating at low pressures and significantly different frequencies are often used for a variety of applications in semiconductor manufacturing in order to control the mean ion energy at the electrodes separately from the ion flux. However, recent computational studies have indicated that this separate control is limited by the frequency coupling effects and by the contribution of secondary electrons to the ionization dynamics [Donkó et al., Appl. Phys. Lett. 97, 081501 (2010); Schulze et al., Plasma Sources Sci. Technol. 20, 045007 (2011)]. Here, we verify these simulation results experimentally by measuring the ion flux to an electrode as a function of the low frequency (LF) and high frequency power at different neutral gas pressures in a 2f CCP operated at 2.26 MHz and 13.56 MHz in argon. In agreement with previous computational predictions, we find the ion flux to decrease as a function of the LF power at a low pressure of 1 mTorr due to the frequency coupling and to increase as a function of the LF power at a higher pressure of 60 mTorr due to the presence of secondary electrons. These experimental findings show that separate control of ion properties in classical 2f CCPs is generally not possible, but potentially limited to specific discharge conditions. © 2019 Author(s). AIP Publishing 2019 Article PeerReviewed Saikia, Partha and Bhuyan, Heman and Yap, Seong Ling and Escalona, Miguel and Favre, Mario and Wyndham, Edmund and Schulze, Julian (2019) Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas. Physics of Plasmas, 26 (8). 083505. ISSN 1070-664X https://doi.org/10.1063/1.5094603 doi:10.1063/1.5094603
institution	Universiti Malaya
building	UM Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaya
content_source	UM Research Repository
url_provider	http://eprints.um.edu.my/
topic	Q Science (General) QC Physics
spellingShingle	Q Science (General) QC Physics Saikia, Partha Bhuyan, Heman Yap, Seong Ling Escalona, Miguel Favre, Mario Wyndham, Edmund Schulze, Julian Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
description	Classical dual-frequency capacitively coupled plasmas (2f CCPs) operating at low pressures and significantly different frequencies are often used for a variety of applications in semiconductor manufacturing in order to control the mean ion energy at the electrodes separately from the ion flux. However, recent computational studies have indicated that this separate control is limited by the frequency coupling effects and by the contribution of secondary electrons to the ionization dynamics [Donkó et al., Appl. Phys. Lett. 97, 081501 (2010); Schulze et al., Plasma Sources Sci. Technol. 20, 045007 (2011)]. Here, we verify these simulation results experimentally by measuring the ion flux to an electrode as a function of the low frequency (LF) and high frequency power at different neutral gas pressures in a 2f CCP operated at 2.26 MHz and 13.56 MHz in argon. In agreement with previous computational predictions, we find the ion flux to decrease as a function of the LF power at a low pressure of 1 mTorr due to the frequency coupling and to increase as a function of the LF power at a higher pressure of 60 mTorr due to the presence of secondary electrons. These experimental findings show that separate control of ion properties in classical 2f CCPs is generally not possible, but potentially limited to specific discharge conditions. © 2019 Author(s).
format	Article
author	Saikia, Partha Bhuyan, Heman Yap, Seong Ling Escalona, Miguel Favre, Mario Wyndham, Edmund Schulze, Julian
author_facet	Saikia, Partha Bhuyan, Heman Yap, Seong Ling Escalona, Miguel Favre, Mario Wyndham, Edmund Schulze, Julian
author_sort	Saikia, Partha
title	Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
title_short	Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
title_full	Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
title_fullStr	Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
title_full_unstemmed	Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
title_sort	experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas
publisher	AIP Publishing
publishDate	2019
url	http://eprints.um.edu.my/23578/ https://doi.org/10.1063/1.5094603
_version_	1657488230322274304
score	13.211869

Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

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