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Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution

Formation of anodic samarium oxide thin film by anodisation of 15 nm thin sputtered samarium metal on silicon substrate was systematically investigated. Sputtered Sm on Si substrate was followed by anodisation in 0.01 M NaOH (pH 11) at various applied voltages (10, 15, 20, and 25 V). All anodisation...

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Main Authors: Wong, Yew Hoong, Lee, Chit Ying, Goh, Kian Heng
Format: Article
Published: Institution of Engineering and Technology 2017
Subjects:
TJ Mechanical engineering and machinery
Online Access:http://eprints.um.edu.my/22781/
https://doi.org/10.1049/mnl.2016.0624
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spelling my.um.eprints.227812019-10-21T07:44:19Z http://eprints.um.edu.my/22781/ Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution Wong, Yew Hoong Lee, Chit Ying Goh, Kian Heng TJ Mechanical engineering and machinery Formation of anodic samarium oxide thin film by anodisation of 15 nm thin sputtered samarium metal on silicon substrate was systematically investigated. Sputtered Sm on Si substrate was followed by anodisation in 0.01 M NaOH (pH 11) at various applied voltages (10, 15, 20, and 25 V). All anodisation processes were performed for 10 min at room temperature in the bath with constant stirring. The crystallinity of Sm2O3 film was evaluated by X-ray diffraction analysis. The crystallite size of Sm2O3 was calculated by Scherrer equation. The cross-section of 20 V sample was examined by high-resolution transmission electron microscope. The sample anodised at 20 V demonstrated the highest electrical breakdown field of 9.50 MV/cm at 10-4 A/cm2. This is attributed to the lowest effective oxide charge, slow trap charge density, average interface trap density, and total interface trap density. Institution of Engineering and Technology 2017 Article PeerReviewed Wong, Yew Hoong and Lee, Chit Ying and Goh, Kian Heng (2017) Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution. Micro & Nano Letters, 12 (6). pp. 347-351. ISSN 1750-0443 https://doi.org/10.1049/mnl.2016.0624 doi:10.1049/mnl.2016.0624
institution Universiti Malaya
building UM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaya
content_source UM Research Repository
url_provider http://eprints.um.edu.my/
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Wong, Yew Hoong
Lee, Chit Ying
Goh, Kian Heng
Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution
description Formation of anodic samarium oxide thin film by anodisation of 15 nm thin sputtered samarium metal on silicon substrate was systematically investigated. Sputtered Sm on Si substrate was followed by anodisation in 0.01 M NaOH (pH 11) at various applied voltages (10, 15, 20, and 25 V). All anodisation processes were performed for 10 min at room temperature in the bath with constant stirring. The crystallinity of Sm2O3 film was evaluated by X-ray diffraction analysis. The crystallite size of Sm2O3 was calculated by Scherrer equation. The cross-section of 20 V sample was examined by high-resolution transmission electron microscope. The sample anodised at 20 V demonstrated the highest electrical breakdown field of 9.50 MV/cm at 10-4 A/cm2. This is attributed to the lowest effective oxide charge, slow trap charge density, average interface trap density, and total interface trap density.
format Article
author Wong, Yew Hoong
Lee, Chit Ying
Goh, Kian Heng
author_facet Wong, Yew Hoong
Lee, Chit Ying
Goh, Kian Heng
author_sort Wong, Yew Hoong
title Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution
title_short Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution
title_full Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution
title_fullStr Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution
title_full_unstemmed Influence of applied voltage on the physical and electrical properties of anodic Sm2O3 thin films on Si in 0.01 M NaOH solution
title_sort influence of applied voltage on the physical and electrical properties of anodic sm2o3 thin films on si in 0.01 m naoh solution
publisher Institution of Engineering and Technology
publishDate 2017
url http://eprints.um.edu.my/22781/
https://doi.org/10.1049/mnl.2016.0624
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score 13.223943

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