Design and analysis of MEMS high sensitive capacitive pressure sensor
In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compar...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Medwell Journals
2016
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/18230/ http://medwelljournals.com/abstract/?doi=jeasci.2016.2688.2692 |
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