Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films
In the present work, an approximation method was used to determine both the crystallite size and microstrain from XRD profile of TiSiN thin film deposited on high speed steel substrates. The estimated crystallite size obtained via this approximation method was in good agreement with the resulting mi...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Elsevier
2012
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/11823/ https://doi.org/10.1016/j.vacuum.2011.10.011 |
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