Measurement of dielectric constant of silicon wafer using microwave non-destrictive testing and direct current technique: article / Nadia Md Kamal
This paper presents comparison between measurement of dielectric constant of silicon wafer by using MNDT which is at high frequency and by using HIOKJ 3532-50 LCR HiTESTER which at low frequency. Measurement of dielectric properties of silicon wafer at microwave frequencies is performed in free spac...
Saved in:
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2010
|
| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/99416/1/94416.pdf https://ir.uitm.edu.my/id/eprint/99416/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|