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Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]

Advanced analytical tools that have been primarily used for research and development application in the past are now being used extensively to understand semiconductor failure analysis and reliability problems. In this paper, we will discuss an application and technique in the use of Atomic Force Mi...

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Main Authors: Yusuf, R., Taking, S., Halim, N.H.A., Aris, H., Hussein, I.
Format: Conference or Workshop Item
Language:English
Published: 2006
Subjects:
Electronics
Online Access:https://ir.uitm.edu.my/id/eprint/81936/1/81936.PDF
https://ir.uitm.edu.my/id/eprint/81936/
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id my.uitm.ir.81936
record_format eprints
spelling my.uitm.ir.819362023-11-17T02:31:50Z https://ir.uitm.edu.my/id/eprint/81936/ Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.] Yusuf, R. Taking, S. Halim, N.H.A. Aris, H. Hussein, I. Electronics Advanced analytical tools that have been primarily used for research and development application in the past are now being used extensively to understand semiconductor failure analysis and reliability problems. In this paper, we will discuss an application and technique in the use of Atomic Force Microscopy (AFM), Mini Secondary Ion Mass Spectroscopy (MiniSIMS), and Scanning Electron Microscopy (SEM) for teaching and learning purposes. These tools have been extensively used in identifying semiconductor characterization which contributes to enhancing the fabrication processes in Microelectronic labs specifically. 2006 Conference or Workshop Item PeerReviewed text en https://ir.uitm.edu.my/id/eprint/81936/1/81936.PDF Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]. (2006) In: Volume No. 1: Science and Technology, 30 – 31 May 2006, Swiss Garden Resort & Spa Kuantan, Pahang.
institution Universiti Teknologi Mara
building Tun Abdul Razak Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Mara
content_source UiTM Institutional Repository
url_provider http://ir.uitm.edu.my/
language English
topic Electronics
spellingShingle Electronics
Yusuf, R.
Taking, S.
Halim, N.H.A.
Aris, H.
Hussein, I.
Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]
description Advanced analytical tools that have been primarily used for research and development application in the past are now being used extensively to understand semiconductor failure analysis and reliability problems. In this paper, we will discuss an application and technique in the use of Atomic Force Microscopy (AFM), Mini Secondary Ion Mass Spectroscopy (MiniSIMS), and Scanning Electron Microscopy (SEM) for teaching and learning purposes. These tools have been extensively used in identifying semiconductor characterization which contributes to enhancing the fabrication processes in Microelectronic labs specifically.
format Conference or Workshop Item
author Yusuf, R.
Taking, S.
Halim, N.H.A.
Aris, H.
Hussein, I.
author_facet Yusuf, R.
Taking, S.
Halim, N.H.A.
Aris, H.
Hussein, I.
author_sort Yusuf, R.
title Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]
title_short Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]
title_full Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]
title_fullStr Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]
title_full_unstemmed Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]
title_sort advanced analytical tools in kukum's microelectronics laboratory / r. yusuf …[et al.]
publishDate 2006
url https://ir.uitm.edu.my/id/eprint/81936/1/81936.PDF
https://ir.uitm.edu.my/id/eprint/81936/
_version_ 1783882201379635200
score 13.211869

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