Cover Image

Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi

This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated...

Full description

Saved in:
Bibliographic Details
Main Author: Madzhi, Nina Korlina
Format: Book Section
Language:English
Published: Institute of Graduate Studies, UiTM 2012
Subjects:
Malaysia
Online Access:http://ir.uitm.edu.my/id/eprint/19111/1/ABS_NINA%20KORLINA%20MADZHI%20TDRA%20VOL%201%20IGS%2012.pdf
http://ir.uitm.edu.my/id/eprint/19111/
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.uitm.ir.19111
record_format eprints
spelling my.uitm.ir.191112018-06-11T01:16:18Z http://ir.uitm.edu.my/id/eprint/19111/ Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi Madzhi, Nina Korlina Malaysia This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated with CMOS micromachining technique. The fabricated piezoresistive microcantilever performed the fabrication process characterization to prove the viability of the design. Finally, the objective in this work is to identify suitable Glucose immobilization technique onto microcantilever surface. The methodology of this work starts with the designing of piezoresistive microcantilever. The microcantilever beam length is selected at 195μm and width, 70μm. On this microcantilever beam there are four different piezoresistor with the length of 80μm, 110μm, 140μm and 170μm. The sacrificial layer of BPSG material in the piezoresistive microcantilever have two different thickness of 0.9μm and 1.8μm. Institute of Graduate Studies, UiTM 2012 Book Section PeerReviewed text en http://ir.uitm.edu.my/id/eprint/19111/1/ABS_NINA%20KORLINA%20MADZHI%20TDRA%20VOL%201%20IGS%2012.pdf Madzhi, Nina Korlina (2012) Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi. In: The Doctoral Research Abstracts. IPSis Biannual Publication, 1 (1). Institute of Graduate Studies, UiTM, Shah Alam.
institution Universiti Teknologi Mara
building Tun Abdul Razak Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Mara
content_source UiTM Institutional Repository
url_provider http://ir.uitm.edu.my/
language English
topic Malaysia
spellingShingle Malaysia
Madzhi, Nina Korlina
Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
description This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated with CMOS micromachining technique. The fabricated piezoresistive microcantilever performed the fabrication process characterization to prove the viability of the design. Finally, the objective in this work is to identify suitable Glucose immobilization technique onto microcantilever surface. The methodology of this work starts with the designing of piezoresistive microcantilever. The microcantilever beam length is selected at 195μm and width, 70μm. On this microcantilever beam there are four different piezoresistor with the length of 80μm, 110μm, 140μm and 170μm. The sacrificial layer of BPSG material in the piezoresistive microcantilever have two different thickness of 0.9μm and 1.8μm.
format Book Section
author Madzhi, Nina Korlina
author_facet Madzhi, Nina Korlina
author_sort Madzhi, Nina Korlina
title Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
title_short Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
title_full Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
title_fullStr Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
title_full_unstemmed Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
title_sort development and fabrication of piezoresistive microcantilever-based glucose biosensor / nina korlina madzhi
publisher Institute of Graduate Studies, UiTM
publishDate 2012
url http://ir.uitm.edu.my/id/eprint/19111/1/ABS_NINA%20KORLINA%20MADZHI%20TDRA%20VOL%201%20IGS%2012.pdf
http://ir.uitm.edu.my/id/eprint/19111/
_version_ 1685649169522360320
score 13.211869

Similar Items