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A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao

The production of Integrated Circuits (IC) is a detailed and exacting process requiring tight specifications and precise equipment. The high cost and unique traits of this equipment requires high utilization and maximum throughput to achieve real profits. The design of fabrication facility (FAB) pro...

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Main Authors: Terry, Adam, Ramulu, Mamidala, Nageswara Rao, Posinasetti
Format: Article
Language:English
Published: Faculty of Mechanical Engineering and University Publication Centre (UPENA) 2009
Online Access:http://ir.uitm.edu.my/id/eprint/17619/2/AJ_ADAM%20TERRY%20JME%2009.pdf
http://ir.uitm.edu.my/id/eprint/17619/
https://jmeche.uitm.edu.my/
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spelling my.uitm.ir.176192019-12-24T07:06:31Z http://ir.uitm.edu.my/id/eprint/17619/ A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao Terry, Adam Ramulu, Mamidala Nageswara Rao, Posinasetti The production of Integrated Circuits (IC) is a detailed and exacting process requiring tight specifications and precise equipment. The high cost and unique traits of this equipment requires high utilization and maximum throughput to achieve real profits. The design of fabrication facility (FAB) processes requires a thorough understanding of the adverse effects that random machine availability has on system performance. These effects (increased cycle time, decreased and variable throughput, etc) can be offset by tool group flexibility. Tool group flexibility can be described by two measures: machine flexibility (the number of tasks a machine can perform) and task flexibility (the number of machines qualified to perform a specific task). These two measures are related by the ratio of the number of machines in the tool group to the number of tasks that the group must perform. This paper utilizes a combined linear programming and simulation approach in an attempt to model the manufacturing system to gain insight into the production dynamics. The model is based on current production methodology and the use of modular equipment (steppers). The results include some insight into the added cost of flexibility and the associated production ramifications. Faculty of Mechanical Engineering and University Publication Centre (UPENA) 2009 Article PeerReviewed text en http://ir.uitm.edu.my/id/eprint/17619/2/AJ_ADAM%20TERRY%20JME%2009.pdf Terry, Adam and Ramulu, Mamidala and Nageswara Rao, Posinasetti (2009) A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao. Journal of Mechanical Engineering (JMechE), 6 (1). pp. 19-41. ISSN 1823-5514 ; 2550-164X https://jmeche.uitm.edu.my/
institution Universiti Teknologi Mara
building Tun Abdul Razak Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Mara
content_source UiTM Institutional Repository
url_provider http://ir.uitm.edu.my/
language English
description The production of Integrated Circuits (IC) is a detailed and exacting process requiring tight specifications and precise equipment. The high cost and unique traits of this equipment requires high utilization and maximum throughput to achieve real profits. The design of fabrication facility (FAB) processes requires a thorough understanding of the adverse effects that random machine availability has on system performance. These effects (increased cycle time, decreased and variable throughput, etc) can be offset by tool group flexibility. Tool group flexibility can be described by two measures: machine flexibility (the number of tasks a machine can perform) and task flexibility (the number of machines qualified to perform a specific task). These two measures are related by the ratio of the number of machines in the tool group to the number of tasks that the group must perform. This paper utilizes a combined linear programming and simulation approach in an attempt to model the manufacturing system to gain insight into the production dynamics. The model is based on current production methodology and the use of modular equipment (steppers). The results include some insight into the added cost of flexibility and the associated production ramifications.
format Article
author Terry, Adam
Ramulu, Mamidala
Nageswara Rao, Posinasetti
spellingShingle Terry, Adam
Ramulu, Mamidala
Nageswara Rao, Posinasetti
A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao
author_facet Terry, Adam
Ramulu, Mamidala
Nageswara Rao, Posinasetti
author_sort Terry, Adam
title A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao
title_short A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao
title_full A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao
title_fullStr A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao
title_full_unstemmed A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao
title_sort method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / adam terry, mamidala ramulu and posinasetti nageswara rao
publisher Faculty of Mechanical Engineering and University Publication Centre (UPENA)
publishDate 2009
url http://ir.uitm.edu.my/id/eprint/17619/2/AJ_ADAM%20TERRY%20JME%2009.pdf
http://ir.uitm.edu.my/id/eprint/17619/
https://jmeche.uitm.edu.my/
_version_ 1685648967578157056
score 13.223943

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