Study the effect of doping process on the PMOS structure using silvaco TCAD tools / Aida Zulia Zulhanip
This paper presents the study on the effect of doping process on the PMOS structure using Silvaco TCAD Tools. This research done by dope the P-type material into the polysilicon to observe the electrical properties and performance of PMOS structure at constant dose concentration of 3.0el I (/cm5) an...
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| Format: | Thesis |
| Language: | English |
| Published: |
2007
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| Online Access: | https://ir.uitm.edu.my/id/eprint/102925/1/102925.pdf https://ir.uitm.edu.my/id/eprint/102925/ |
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