Novel nanofabrication process of oxide patterns using AFM in low operating temperature: a promising lithographic tool for future molecular electronics
Field-induced oxidation has become a promising process that is capable of directly producing high-resolution surface oxide patterns on variety materials. In this report, a low temperature operation of an atomic force microscope (AFM) was used to condense ambient humidity to perform a thin frozen wat...
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Main Authors: | , , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2007
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Subjects: | |
Online Access: | http://irep.iium.edu.my/9447/1/AGUS_-_Proc_ICEEI-2007.pdf http://irep.iium.edu.my/9447/ |
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