Finite element simulation of MEMS piezoelectric energy scavenger based on pzt thin film
Vibration energy harvesting has been progressively developed in the advancement of technology and widely used by a lot of researchers around the world. There is a very high demand for energy scavenging around the world due to it being cheaper in price, possibly miniaturized within a system, long...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English English English |
| Published: |
IIUM Press, International Islamic University Malaysia
2019
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/72539/1/72539_Finite%20element%20simulation.pdf http://irep.iium.edu.my/72539/7/72539_Finite%20element%20simulation%20of%20mems_scopus.pdf http://irep.iium.edu.my/72539/8/72539_FINITE%20ELEMENT%20SIMULATION%20OF%20MEMS%20PIEZOELECTRIC%20ENERGY%20SCAVENGER%20BASED%20ON%20PZT%20THIN%20FILM_WOS.pdf http://irep.iium.edu.my/72539/ https://journals.iium.edu.my/ejournal/index.php/iiumej/article/view/991 https://doi.org/10.31436/iiumej.v20i1.991 |
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| Summary: | Vibration energy harvesting has been progressively developed in the
advancement of technology and widely used by a lot of researchers around the world.
There is a very high demand for energy scavenging around the world due to it being
cheaper in price, possibly miniaturized within a system, long lasting, and environmentally
friendly. The conventional battery is hazardous to the environment and has a shorter
operating lifespan. Therefore, ambient vibration energy serves as an alternative that can
replace the battery because it can be integrated and compatible to micro-electromechanical
systems. This paper presents the design and analysis of a MEMS piezoelectric energy
harvester, which is a vibration energy harvesting type. The energy harvester was formed
using Lead Zicronate Titanate (PZT-5A) as the piezoelectric thin film, silicon as the
substrate layer and structural steel as the electrode layer. The resonance frequency will
provide the maximum output power, maximum output voltage and maximum
displacement of vibration. The operating mode also plays an important role to generate
larger output voltage with less displacement of cantilever. Some designs also have been
studied by varying height and length of piezoelectric materials. Hence, this project will
demonstrate the simulation of a MEMS piezoelectric device for a low power electronic
performance. Simulation results show PZT-5A piezoelectric energy with a length of 31
mm and height of 0.16 mm generates maximum output voltage of 7.435 V and maximum
output power of 2.30 mW at the resonance frequency of 40 Hz. |
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