Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for cre...
保存先:
| 主要な著者: | , , , |
|---|---|
| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
IOP Publishing
2013
|
| 主題: | |
| オンライン･アクセス: | http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf http://irep.iium.edu.my/40692/ http://iopscience.iop.org/1757-899X/53/1/012090 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|