Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for cre...
保存先:
| 主要な著者: | , , , |
|---|---|
| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
IOP Publishing
2013
|
| 主題: | |
| オンライン･アクセス: | http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf http://irep.iium.edu.my/40692/ http://iopscience.iop.org/1757-899X/53/1/012090 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|
| id |
my.iium.irep.40692 |
|---|---|
| record_format |
dspace |
| spelling |
my.iium.irep.406922018-05-24T06:49:29Z http://irep.iium.edu.my/40692/ Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application Sabur, Abdus A., Moudood Ali, Mohammad Yeakub Maleque, Md. Abdul TS Manufactures Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for creation of continuous conductive pyrolytic carbon layer on the machined surface. Experiments are conducted by varying the voltage (V), capacitance (C) and rotational speed (N). Correlating these variables a mathematical model for surface roughness (SR) is developed using Taguchi method. The results showed that the V and C are the significant parameters of SR in micro-EDM for nonconductive ZrO2 ceramic. The model also showed that SR increases with the increase of V and C. IOP Publishing 2013 Article REM application/pdf en http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf Sabur, Abdus and A., Moudood and Ali, Mohammad Yeakub and Maleque, Md. Abdul (2013) Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application. IOP Conference Series: Materials Science and Engineering, 53 (2013). pp. 1-5. ISSN 1757-8981 http://iopscience.iop.org/1757-899X/53/1/012090 doi:10.1088/1757-899X/53/1/012090 |
| institution |
Universiti Islam Antarabangsa Malaysia |
| building |
IIUM Library |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
International Islamic University Malaysia |
| content_source |
IIUM Repository (IREP) |
| url_provider |
http://irep.iium.edu.my/ |
| language |
English |
| topic |
TS Manufactures |
| spellingShingle |
TS Manufactures Sabur, Abdus A., Moudood Ali, Mohammad Yeakub Maleque, Md. Abdul Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application |
| description |
Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for creation of continuous conductive pyrolytic carbon layer on the machined surface. Experiments are conducted by varying the voltage (V), capacitance (C) and rotational speed (N). Correlating these variables a mathematical model for surface roughness (SR) is developed using Taguchi method. The results showed that the V and C are the significant parameters of SR in micro-EDM for nonconductive ZrO2 ceramic. The model also showed that SR increases with the increase of V and C. |
| format |
Article |
| author |
Sabur, Abdus A., Moudood Ali, Mohammad Yeakub Maleque, Md. Abdul |
| author_facet |
Sabur, Abdus A., Moudood Ali, Mohammad Yeakub Maleque, Md. Abdul |
| author_sort |
Sabur, Abdus |
| title |
Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application |
| title_short |
Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application |
| title_full |
Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application |
| title_fullStr |
Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application |
| title_full_unstemmed |
Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application |
| title_sort |
investigation of surface roughness in micro-electro discharge machining of nonconductive zro2 for mems application |
| publisher |
IOP Publishing |
| publishDate |
2013 |
| url |
http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf http://irep.iium.edu.my/40692/ http://iopscience.iop.org/1757-899X/53/1/012090 |
| _version_ |
1643611877167595520 |
| score |
13.251813 |