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Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application

Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for cre...

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Main Authors: Sabur, Abdus, A., Moudood, Ali, Mohammad Yeakub, Maleque, Md. Abdul
Format: Article
Language:English
Published: IOP Publishing 2013
Subjects:
TS Manufactures
Online Access:http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf
http://irep.iium.edu.my/40692/
http://iopscience.iop.org/1757-899X/53/1/012090
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spelling my.iium.irep.406922018-05-24T06:49:29Z http://irep.iium.edu.my/40692/ Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application Sabur, Abdus A., Moudood Ali, Mohammad Yeakub Maleque, Md. Abdul TS Manufactures Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for creation of continuous conductive pyrolytic carbon layer on the machined surface. Experiments are conducted by varying the voltage (V), capacitance (C) and rotational speed (N). Correlating these variables a mathematical model for surface roughness (SR) is developed using Taguchi method. The results showed that the V and C are the significant parameters of SR in micro-EDM for nonconductive ZrO2 ceramic. The model also showed that SR increases with the increase of V and C. IOP Publishing 2013 Article REM application/pdf en http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf Sabur, Abdus and A., Moudood and Ali, Mohammad Yeakub and Maleque, Md. Abdul (2013) Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application. IOP Conference Series: Materials Science and Engineering, 53 (2013). pp. 1-5. ISSN 1757-8981 http://iopscience.iop.org/1757-899X/53/1/012090 doi:10.1088/1757-899X/53/1/012090
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TS Manufactures
spellingShingle TS Manufactures
Sabur, Abdus
A., Moudood
Ali, Mohammad Yeakub
Maleque, Md. Abdul
Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
description Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for creation of continuous conductive pyrolytic carbon layer on the machined surface. Experiments are conducted by varying the voltage (V), capacitance (C) and rotational speed (N). Correlating these variables a mathematical model for surface roughness (SR) is developed using Taguchi method. The results showed that the V and C are the significant parameters of SR in micro-EDM for nonconductive ZrO2 ceramic. The model also showed that SR increases with the increase of V and C.
format Article
author Sabur, Abdus
A., Moudood
Ali, Mohammad Yeakub
Maleque, Md. Abdul
author_facet Sabur, Abdus
A., Moudood
Ali, Mohammad Yeakub
Maleque, Md. Abdul
author_sort Sabur, Abdus
title Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
title_short Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
title_full Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
title_fullStr Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
title_full_unstemmed Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
title_sort investigation of surface roughness in micro-electro discharge machining of nonconductive zro2 for mems application
publisher IOP Publishing
publishDate 2013
url http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf
http://irep.iium.edu.my/40692/
http://iopscience.iop.org/1757-899X/53/1/012090
_version_ 1643611877167595520
score 13.251813

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