Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF powe...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27469/1/Structural_properties_of_deposited_ZnO_thin_films_on_flexible_substrate_at_various_substrate_temperatures_and_Rf_power.pdf http://irep.iium.edu.my/27469/ http://www.scientific.net/AMR.576.598 |
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| Summary: | ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at
different substrate temperature and different RF power. In this work, we investigated the
dependence of the deposition rate and also the ZnO physical and electrical properties on the
substrate temperature and RF power. It is observed that the deposition rate increased as the
temperature and RF power increased. FE-SEM images confirmed that microstructure of the thin
films consists of nanoparticles. XRD data confirmed that the ZnO thin films at various RF power
and substrate temperature have (002) structure. |
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