Fabrication of micro cavities by micro electrical discharged machining
The LIGA (Lithography, Electroplating and Molding) technique can fabricate high aspect ratio micro components with sub-micrometer accuracy and few tens of nano meter surface finish. This technique uses deep x-ray lithography with synchrotron radiation and as a result, the process becomes very comple...
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2000
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27305/1/070_ICM_2000_BUET_285-291.pdf http://irep.iium.edu.my/27305/ |
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