Cover Image

Application of focused ion beam micromachining: a review

Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a...

Full description

Saved in:
Bibliographic Details
Main Authors: Rahman Azmil, Nur Atiqah, Jaafar, Israd Hakim, Ali, Mohammad Yeakub, Asfana, Banu
Format: Article
Language:English
Published: Trans Tech Publications, Switzerland 2012
Subjects:
TS Manufactures
Online Access:http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf
http://irep.iium.edu.my/27010/
http://www.scientific.net/AMR.576.507
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.iium.irep.27010
record_format dspace
spelling my.iium.irep.270102015-10-21T23:09:49Z http://irep.iium.edu.my/27010/ Application of focused ion beam micromachining: a review Rahman Azmil, Nur Atiqah Jaafar, Israd Hakim Ali, Mohammad Yeakub Asfana, Banu TS Manufactures Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented. Trans Tech Publications, Switzerland 2012-10-08 Article REM application/pdf en http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf Rahman Azmil, Nur Atiqah and Jaafar, Israd Hakim and Ali, Mohammad Yeakub and Asfana, Banu (2012) Application of focused ion beam micromachining: a review. Advanced Materials Research, 576. pp. 507-510. ISSN 1022-6680 http://www.scientific.net/AMR.576.507 10.4028/www.scientific.net/AMR.576.507
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TS Manufactures
spellingShingle TS Manufactures
Rahman Azmil, Nur Atiqah
Jaafar, Israd Hakim
Ali, Mohammad Yeakub
Asfana, Banu
Application of focused ion beam micromachining: a review
description Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented.
format Article
author Rahman Azmil, Nur Atiqah
Jaafar, Israd Hakim
Ali, Mohammad Yeakub
Asfana, Banu
author_facet Rahman Azmil, Nur Atiqah
Jaafar, Israd Hakim
Ali, Mohammad Yeakub
Asfana, Banu
author_sort Rahman Azmil, Nur Atiqah
title Application of focused ion beam micromachining: a review
title_short Application of focused ion beam micromachining: a review
title_full Application of focused ion beam micromachining: a review
title_fullStr Application of focused ion beam micromachining: a review
title_full_unstemmed Application of focused ion beam micromachining: a review
title_sort application of focused ion beam micromachining: a review
publisher Trans Tech Publications, Switzerland
publishDate 2012
url http://irep.iium.edu.my/27010/1/AMR.576.507_FIB_Atiqah.pdf
http://irep.iium.edu.my/27010/
http://www.scientific.net/AMR.576.507
_version_ 1643609251413753856
score 13.211869

Similar Items