Novel mems biosensor with integmted impedance and mass-sensing capabilities
A BIOSENSOR DEVICE (1) PROVIDING AN ANALYSE PLATFORM FOR DETECNNG CELL GROWTH, COMPRISING OFAN ALUMINIUM NITRIDE (AIN) BASE (2), A SHEAR HORIZONTAL-SURFACE ACOUSTIC WAVE (SH-SAW) RESONATOR INCLUDING AN INPUT TMNSDUCER (4) AND AN OUTPUT TRA.NSDUCER (5) SYMMETRICALLY POSmONED ON THE ALUMTNUM NTTRIOE...
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| Main Authors: | , , , |
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| Format: | Patent |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/25808/1/Biosensor_MyIPO.pdf http://irep.iium.edu.my/25808/ |
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