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Characterization of a MEMS-Based Humidity Sensor

Humidity sensors are very essential in many industrial processes and household appliances. They enable system operators and control mangers to fully monitor their processes in the industry. However, these sensors are miniaturized to be in micro-scale units due the development of micromachining te...

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Main Author: AMIN ALI, AHMED ABDELAZIZ
Format: Final Year Project
Language:English
Published: Universiti Teknologi PETRONAS 2017
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://utpedia.utp.edu.my/22984/1/Dissertation-Ahmed-17713.pdf
http://utpedia.utp.edu.my/22984/
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spelling my-utp-utpedia.229842022-03-07T07:21:53Z http://utpedia.utp.edu.my/22984/ Characterization of a MEMS-Based Humidity Sensor AMIN ALI, AHMED ABDELAZIZ TK Electrical engineering. Electronics Nuclear engineering Humidity sensors are very essential in many industrial processes and household appliances. They enable system operators and control mangers to fully monitor their processes in the industry. However, these sensors are miniaturized to be in micro-scale units due the development of micromachining technology. As a consequence, the sizes and the performance of the sensors have been drastically improved to be compatible with various complex systems. Whereas, the cost of the sensors have become much lower. Such devices are called Micro-Electro-Mechanical Systems (MEMS). There are many types of MEMS-Based humidity sensors such as capacitive humidity sensor and Piezoresistive humidity sensor. This research work describes the performance of a capacitive MEMS-Based humidity sensor that is fabricated using PolyMUMPS process which is a three-layer surface micromachining process. Therefore, the key purpose of this project is to mechanically and electrically characterize a MEMS-Based capacitive humidity sensor that it is actuated using electromagnetic actuation method based on Lorentz force principle. The designed integrated sensor encompasses of a sensing element and a capacitive readout circuit. Universiti Teknologi PETRONAS 2017-01 Final Year Project NonPeerReviewed application/pdf en http://utpedia.utp.edu.my/22984/1/Dissertation-Ahmed-17713.pdf AMIN ALI, AHMED ABDELAZIZ (2017) Characterization of a MEMS-Based Humidity Sensor. Universiti Teknologi PETRONAS. (Submitted)
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Electronic and Digitized Intellectual Asset
url_provider http://utpedia.utp.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
AMIN ALI, AHMED ABDELAZIZ
Characterization of a MEMS-Based Humidity Sensor
description Humidity sensors are very essential in many industrial processes and household appliances. They enable system operators and control mangers to fully monitor their processes in the industry. However, these sensors are miniaturized to be in micro-scale units due the development of micromachining technology. As a consequence, the sizes and the performance of the sensors have been drastically improved to be compatible with various complex systems. Whereas, the cost of the sensors have become much lower. Such devices are called Micro-Electro-Mechanical Systems (MEMS). There are many types of MEMS-Based humidity sensors such as capacitive humidity sensor and Piezoresistive humidity sensor. This research work describes the performance of a capacitive MEMS-Based humidity sensor that is fabricated using PolyMUMPS process which is a three-layer surface micromachining process. Therefore, the key purpose of this project is to mechanically and electrically characterize a MEMS-Based capacitive humidity sensor that it is actuated using electromagnetic actuation method based on Lorentz force principle. The designed integrated sensor encompasses of a sensing element and a capacitive readout circuit.
format Final Year Project
author AMIN ALI, AHMED ABDELAZIZ
author_facet AMIN ALI, AHMED ABDELAZIZ
author_sort AMIN ALI, AHMED ABDELAZIZ
title Characterization of a MEMS-Based Humidity Sensor
title_short Characterization of a MEMS-Based Humidity Sensor
title_full Characterization of a MEMS-Based Humidity Sensor
title_fullStr Characterization of a MEMS-Based Humidity Sensor
title_full_unstemmed Characterization of a MEMS-Based Humidity Sensor
title_sort characterization of a mems-based humidity sensor
publisher Universiti Teknologi PETRONAS
publishDate 2017
url http://utpedia.utp.edu.my/22984/1/Dissertation-Ahmed-17713.pdf
http://utpedia.utp.edu.my/22984/
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score 13.211869

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