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Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement

The mathematical modeling and the finite element analysis (FEA) of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) resonator has been presented. The resonator is designed based on 0.35 µm CMOS foundry fabrication technology. The sensing principle of the resonat...

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Main Author: FADLALLA, MOHAMED AHMED ELTAYEB
Format: Final Year Project
Language:English
Published: Universiti Teknologi PETRONAS 2017
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://utpedia.utp.edu.my/22962/1/FINAL%20DISSERTATION.pdf
http://utpedia.utp.edu.my/22962/
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spelling my-utp-utpedia.229622022-03-07T07:23:03Z http://utpedia.utp.edu.my/22962/ Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement FADLALLA, MOHAMED AHMED ELTAYEB TK Electrical engineering. Electronics Nuclear engineering The mathematical modeling and the finite element analysis (FEA) of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) resonator has been presented. The resonator is designed based on 0.35 µm CMOS foundry fabrication technology. The sensing principle of the resonator is based on the change in resonance frequency of the CMOS-MEMS resonator due to adsorption/absorption or desorption of humidity on the active material layer of deposited on the moving plate that results in changes in the mass of the device. Simple analytical models of the CMOSMEMS resonator are generated to achieve estimates of the device performs. The effect of changes in lengths and widths of the beams on spring constant, resonance frequency, damping coefficient and quality factor (Q) are investigated. The spring constant is found to decrease with increase the lengths of the beam and increasing with increase the widths of the beam. Universiti Teknologi PETRONAS 2017-01 Final Year Project NonPeerReviewed application/pdf en http://utpedia.utp.edu.my/22962/1/FINAL%20DISSERTATION.pdf FADLALLA, MOHAMED AHMED ELTAYEB (2017) Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement. Universiti Teknologi PETRONAS. (Submitted)
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Electronic and Digitized Intellectual Asset
url_provider http://utpedia.utp.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
FADLALLA, MOHAMED AHMED ELTAYEB
Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
description The mathematical modeling and the finite element analysis (FEA) of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) resonator has been presented. The resonator is designed based on 0.35 µm CMOS foundry fabrication technology. The sensing principle of the resonator is based on the change in resonance frequency of the CMOS-MEMS resonator due to adsorption/absorption or desorption of humidity on the active material layer of deposited on the moving plate that results in changes in the mass of the device. Simple analytical models of the CMOSMEMS resonator are generated to achieve estimates of the device performs. The effect of changes in lengths and widths of the beams on spring constant, resonance frequency, damping coefficient and quality factor (Q) are investigated. The spring constant is found to decrease with increase the lengths of the beam and increasing with increase the widths of the beam.
format Final Year Project
author FADLALLA, MOHAMED AHMED ELTAYEB
author_facet FADLALLA, MOHAMED AHMED ELTAYEB
author_sort FADLALLA, MOHAMED AHMED ELTAYEB
title Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
title_short Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
title_full Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
title_fullStr Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
title_full_unstemmed Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
title_sort optimization of a cmos-mems resonator for applications of relative humidity measurement
publisher Universiti Teknologi PETRONAS
publishDate 2017
url http://utpedia.utp.edu.my/22962/1/FINAL%20DISSERTATION.pdf
http://utpedia.utp.edu.my/22962/
_version_ 1739833013280178176
score 13.211869

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