صورة الغلاف

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR

This research presents the design of CMOS-MEMS device with embedded microheater operating at relatively elevated temperatures (40°C to 150°C) for the purpose of relative humidity measurement. It is designed, simulated, fabricated and characterized to resolve the problem of reversibility and stabi...

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: AHMED ALMAHI, ABDELAZIZ YOUSIF
التنسيق: أطروحة
اللغة:English
منشور في: 2015
الموضوعات:
TK Electrical engineering. Electronics Nuclear engineering
الوصول للمادة أونلاين:http://utpedia.utp.edu.my/21542/1/2015%20-ELECTRICAL%20%26%20ELECTRONIC%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20CMOS-MEMS%20MASS-SENSITIVE%20RELATIVE%20HUMIDITY%20SENSOR%20-%20ABDELAZIZ%20YOUSIF%20AHMED%20ALMAHI.pdf
http://utpedia.utp.edu.my/21542/
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spelling my-utp-utpedia.215422021-09-22T21:01:41Z http://utpedia.utp.edu.my/21542/ DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR AHMED ALMAHI, ABDELAZIZ YOUSIF TK Electrical engineering. Electronics Nuclear engineering This research presents the design of CMOS-MEMS device with embedded microheater operating at relatively elevated temperatures (40°C to 150°C) for the purpose of relative humidity measurement. It is designed, simulated, fabricated and characterized to resolve the problem of reversibility and stability. The sensing principle is based on the change in amplitude of the CMOS-MEMS device due to adsorption/absorption or desorption of humidity on the active material layer of titanium dioxide (Ti02) deposited on the moving plate that results in changes in the mass of the device. The CMOS-MEMS device is operated in the dynamic mode using electrothermal actuation by applying an AC current through the embedded microheater to produce vibrations. These vibrations induce stress at the anchor points of the supporting beams resulting in change of the resistance of the piezoresistors (PZR) which can be measured using a Wheatstone bridge arrangement. 2015-05 Thesis NonPeerReviewed application/pdf en http://utpedia.utp.edu.my/21542/1/2015%20-ELECTRICAL%20%26%20ELECTRONIC%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20CMOS-MEMS%20MASS-SENSITIVE%20RELATIVE%20HUMIDITY%20SENSOR%20-%20ABDELAZIZ%20YOUSIF%20AHMED%20ALMAHI.pdf AHMED ALMAHI, ABDELAZIZ YOUSIF (2015) DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR. PhD thesis, Universiti Teknologi PETRONAS.
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Electronic and Digitized Intellectual Asset
url_provider http://utpedia.utp.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
AHMED ALMAHI, ABDELAZIZ YOUSIF
DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
description This research presents the design of CMOS-MEMS device with embedded microheater operating at relatively elevated temperatures (40°C to 150°C) for the purpose of relative humidity measurement. It is designed, simulated, fabricated and characterized to resolve the problem of reversibility and stability. The sensing principle is based on the change in amplitude of the CMOS-MEMS device due to adsorption/absorption or desorption of humidity on the active material layer of titanium dioxide (Ti02) deposited on the moving plate that results in changes in the mass of the device. The CMOS-MEMS device is operated in the dynamic mode using electrothermal actuation by applying an AC current through the embedded microheater to produce vibrations. These vibrations induce stress at the anchor points of the supporting beams resulting in change of the resistance of the piezoresistors (PZR) which can be measured using a Wheatstone bridge arrangement.
format Thesis
author AHMED ALMAHI, ABDELAZIZ YOUSIF
author_facet AHMED ALMAHI, ABDELAZIZ YOUSIF
author_sort AHMED ALMAHI, ABDELAZIZ YOUSIF
title DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
title_short DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
title_full DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
title_fullStr DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
title_full_unstemmed DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
title_sort design, fabrication and characterization of a cmos-mems mass-sensitive relative humidity sensor
publishDate 2015
url http://utpedia.utp.edu.my/21542/1/2015%20-ELECTRICAL%20%26%20ELECTRONIC%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20CMOS-MEMS%20MASS-SENSITIVE%20RELATIVE%20HUMIDITY%20SENSOR%20-%20ABDELAZIZ%20YOUSIF%20AHMED%20ALMAHI.pdf
http://utpedia.utp.edu.my/21542/
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score 13.251813

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