CHARACTERIZATION OF A CMOS-MEMS DEVICE FOR THE DETECTION OF WEAK VIBRATION
The paper review about the usage of the integration between Complementary Metal Oxide System and Micromechanical system (CMOS-MEMS device) for the detection of weak vibration. The available CMOS-MEMS device at Universiti Teknologi PETRONAS is the device that has high resonance frequency which is 6.1...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2017
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| Online Access: | http://utpedia.utp.edu.my/19100/1/Final%20Dissertation%20Danial%20Hafiz%2019139.pdf http://utpedia.utp.edu.my/19100/ |
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