Performance Analysis and Calibration of a Novel CMOS-MEMS Humidity Sensor
This Study presents calibration and performance analysis of a novel CMOSMEMS humidity sensor that is fabricated using 0.35 μm CMOS technology with embedded micro-heater operates at high temperature, temperature sensor and piezoresistors for the purpose of relative humidity measurements. The devic...
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| Main Author: | |
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| Format: | Final Year Project |
| Language: | English |
| Published: |
IRC
2016
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| Subjects: | |
| Online Access: | http://utpedia.utp.edu.my/17189/1/FYP%20Dissertation.pdf http://utpedia.utp.edu.my/17189/ |
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