CAPACITIVE BASED CMOS-MEMS MICROACTUATOR FOR BIOMEDICAL APPLICATION
The purpose of this project is to design electrostatic microacluator for biomedical application using CMOS and MEMS. The technology of microelectromechanical system (MEMS) is widely used in many daily applications such as aerospace Microsystems, biomedical applications, consumer electronic devic...
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| Format: | Final Year Project |
| Language: | English |
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Universiti Teknologi PETRONAS
2011
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| Online Access: | http://utpedia.utp.edu.my/10310/1/2011%20Bachelor%20-%20Capacitive%20Based%20CMOS-MEMS%20Microactuator%20For%20Biomedical%20Application.pdf http://utpedia.utp.edu.my/10310/ |
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