Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The i...
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Universiti Kebangsaan Malaysia
2012
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| オンライン･アクセス: | http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf http://journalarticle.ukm.my/5301/ http://www.ukm.my/jsm/contents.html |
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my-ukm.journal.53012016-12-14T06:38:02Z http://journalarticle.ukm.my/5301/ Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma Saboohi, S Yap, S·L Chan, L·S Wong, C·S The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage. Universiti Kebangsaan Malaysia 2012-07 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf Saboohi, S and Yap, S·L and Chan, L·S and Wong, C·S (2012) Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma. Sains Malaysiana, 41 (7). pp. 879-884. ISSN 0126-6039 http://www.ukm.my/jsm/contents.html |
| institution |
Universiti Kebangsaan Malaysia |
| building |
Perpustakaan Tun Sri Lanang Library |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Kebangsaan Malaysia |
| content_source |
UKM Journal Article Repository |
| url_provider |
http://journalarticle.ukm.my/ |
| language |
English |
| description |
The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage. |
| format |
Article |
| author |
Saboohi, S Yap, S·L Chan, L·S Wong, C·S |
| spellingShingle |
Saboohi, S Yap, S·L Chan, L·S Wong, C·S Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma |
| author_facet |
Saboohi, S Yap, S·L Chan, L·S Wong, C·S |
| author_sort |
Saboohi, S |
| title |
Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma |
| title_short |
Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma |
| title_full |
Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma |
| title_fullStr |
Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma |
| title_full_unstemmed |
Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma |
| title_sort |
effects of inter-electrode gap and discharge voltage on euv emission from stainless steel vacuum spark plasma |
| publisher |
Universiti Kebangsaan Malaysia |
| publishDate |
2012 |
| url |
http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf http://journalarticle.ukm.my/5301/ http://www.ukm.my/jsm/contents.html |
| _version_ |
1643736363150868480 |
| score |
13.250246 |