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Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma

The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The i...

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Main Authors: Saboohi, S, Yap, S·L, Chan, L·S, Wong, C·S
Format: Article
Language:English
Published: Universiti Kebangsaan Malaysia 2012
Online Access:http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf
http://journalarticle.ukm.my/5301/
http://www.ukm.my/jsm/contents.html
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spelling my-ukm.journal.53012016-12-14T06:38:02Z http://journalarticle.ukm.my/5301/ Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma Saboohi, S Yap, S·L Chan, L·S Wong, C·S The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage. Universiti Kebangsaan Malaysia 2012-07 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf Saboohi, S and Yap, S·L and Chan, L·S and Wong, C·S (2012) Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma. Sains Malaysiana, 41 (7). pp. 879-884. ISSN 0126-6039 http://www.ukm.my/jsm/contents.html
institution Universiti Kebangsaan Malaysia
building Perpustakaan Tun Sri Lanang Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Kebangsaan Malaysia
content_source UKM Journal Article Repository
url_provider http://journalarticle.ukm.my/
language English
description The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage.
format Article
author Saboohi, S
Yap, S·L
Chan, L·S
Wong, C·S
spellingShingle Saboohi, S
Yap, S·L
Chan, L·S
Wong, C·S
Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
author_facet Saboohi, S
Yap, S·L
Chan, L·S
Wong, C·S
author_sort Saboohi, S
title Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_short Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_full Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_fullStr Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_full_unstemmed Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_sort effects of inter-electrode gap and discharge voltage on euv emission from stainless steel vacuum spark plasma
publisher Universiti Kebangsaan Malaysia
publishDate 2012
url http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf
http://journalarticle.ukm.my/5301/
http://www.ukm.my/jsm/contents.html
_version_ 1643736363150868480
score 13.211869

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