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Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors

A series of amorphous carbon nitride (a-CNx) thin films were deposited on silicon (111) substrates using a home-built radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) system. The a-CNx thin films were deposited from a mixture of a fixed flow-rate of ethane (C2H6, 20 sccm) and nit...

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Main Authors: Rozidawati Awang,, Noorain Purhanudin,, Nur Sakinah Salman,
Format: Article
Language:English
Published: Penerbit Universiti Kebangsaan Malaysia 2018
Online Access:http://journalarticle.ukm.my/12668/1/29%20Rozidawati%20Awang.pdf
http://journalarticle.ukm.my/12668/
http://www.ukm.my/jsm/malay_journals/jilid47bil11_2018/KandunganJilid47Bil11_2018.html
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spelling my-ukm.journal.126682019-03-17T11:57:23Z http://journalarticle.ukm.my/12668/ Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors Rozidawati Awang, Noorain Purhanudin, Nur Sakinah Salman, A series of amorphous carbon nitride (a-CNx) thin films were deposited on silicon (111) substrates using a home-built radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) system. The a-CNx thin films were deposited from a mixture of a fixed flow-rate of ethane (C2H6, 20 sccm) and nitrogen (N2, 47 sccm) gases with varying RF power. A higher ratio of C to H (C to H ratio is 1:3) atoms in C2H6 as compared to the ratio in methane (CH4) gas (C to H ratio is 1:4) is expected to produce an interesting effect to the film properties as humidity sensor. The characterization techniques used to determine the morphology and chemical bonding of the thin films are field emission scanning electron microscopy (FESEM) and Fourier transform infrared spectroscopy (FTIR), respectively. The variation of morphology and the existence of nitrile band in these samples are correlated with the electrical properties of a-CNx thin films. Using humidity sensing system, the sensing performance of the samples was examined. It was found that the response of sensors towards the percentage of relative humidity (% RH) change is good resistive responses and good repeatability. The sensitivity of the prepared a-CNx thin films is significantly higher (up to 79%) as compared to previous studies using CH4 or acetylene as precursor gas. Based on these results, the properties and the sensitivity of the a-CNx thin films towards humidity can be tailored by using an appropriate precursor gases and deposition parameters. Penerbit Universiti Kebangsaan Malaysia 2018-11 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/12668/1/29%20Rozidawati%20Awang.pdf Rozidawati Awang, and Noorain Purhanudin, and Nur Sakinah Salman, (2018) Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors. Sains Malaysiana, 47 (11). pp. 2863-2867. ISSN 0126-6039 http://www.ukm.my/jsm/malay_journals/jilid47bil11_2018/KandunganJilid47Bil11_2018.html
institution Universiti Kebangsaan Malaysia
building Perpustakaan Tun Sri Lanang Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Kebangsaan Malaysia
content_source UKM Journal Article Repository
url_provider http://journalarticle.ukm.my/
language English
description A series of amorphous carbon nitride (a-CNx) thin films were deposited on silicon (111) substrates using a home-built radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) system. The a-CNx thin films were deposited from a mixture of a fixed flow-rate of ethane (C2H6, 20 sccm) and nitrogen (N2, 47 sccm) gases with varying RF power. A higher ratio of C to H (C to H ratio is 1:3) atoms in C2H6 as compared to the ratio in methane (CH4) gas (C to H ratio is 1:4) is expected to produce an interesting effect to the film properties as humidity sensor. The characterization techniques used to determine the morphology and chemical bonding of the thin films are field emission scanning electron microscopy (FESEM) and Fourier transform infrared spectroscopy (FTIR), respectively. The variation of morphology and the existence of nitrile band in these samples are correlated with the electrical properties of a-CNx thin films. Using humidity sensing system, the sensing performance of the samples was examined. It was found that the response of sensors towards the percentage of relative humidity (% RH) change is good resistive responses and good repeatability. The sensitivity of the prepared a-CNx thin films is significantly higher (up to 79%) as compared to previous studies using CH4 or acetylene as precursor gas. Based on these results, the properties and the sensitivity of the a-CNx thin films towards humidity can be tailored by using an appropriate precursor gases and deposition parameters.
format Article
author Rozidawati Awang,
Noorain Purhanudin,
Nur Sakinah Salman,
spellingShingle Rozidawati Awang,
Noorain Purhanudin,
Nur Sakinah Salman,
Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
author_facet Rozidawati Awang,
Noorain Purhanudin,
Nur Sakinah Salman,
author_sort Rozidawati Awang,
title Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
title_short Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
title_full Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
title_fullStr Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
title_full_unstemmed Effect of radio frequency power on a-CNx film properties and its performance as humidity sensors
title_sort effect of radio frequency power on a-cnx film properties and its performance as humidity sensors
publisher Penerbit Universiti Kebangsaan Malaysia
publishDate 2018
url http://journalarticle.ukm.my/12668/1/29%20Rozidawati%20Awang.pdf
http://journalarticle.ukm.my/12668/
http://www.ukm.my/jsm/malay_journals/jilid47bil11_2018/KandunganJilid47Bil11_2018.html
_version_ 1643738854651330560
score 13.211869

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