Search Results - "Alignment mark"

Effect of alignment mark architecture on alignment signal behavior in advanced lithography by Normah, Ahmad, Uda, Hashim, Mohd Jeffery, Manaf, Kader Ibrahim, Abdul Wahab

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Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography by Normah Ahmad, Uda Hashim, Mohd Jeffery Manaf, Kadir Ibrahim Abdul Wahab

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Characterization of robust alignment mark to improve alignment performance by Normah, Ahmad, Uda, Hashim, Mohd Jefrey, Manaf, Kader, Ibrahim

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Alignment mark architecture effect on alignment signal behavior in advanced lithography by Normah, Ahmad, Uda, Hashim, Mohd Jeffrey, Manaf, Kader Ibrahim, Abdul Wahab

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Pattern designed for combination of optical lithography and electron beam lithography by S. Fatimah, Abd Rahman, Uda, Hashim, Prof. Dr., Mohammad Nuzaihan, Md Nor, A. M., Mohamed Nuri, Muhamad Emi Azri, Shohini

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Mask design for the reproducible fabrication and reliable pattern transfer for polysilicon nanowire by Tijjani Adam, Shuwa, Uda, Hashim, Prof. Dr., Leow, Pei Ling

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Resist uniformity evaluation through swing curve phenomena by Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa

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The effect(s) of mask alignment to p-n junction / Ahd Syarifuddin Mohd Helmi by Mohd Helmi, Ahd Syarifuddin

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