Diamond turning of soft semiconductors to obtain nanometric mirror surfaces

Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...

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Main Authors: Fang, Fengzhou Z., Venkatesh, Vasisht,C., Zhang, G.X.
Format: Article
Language:en
Published: Springer Verlag 2002
Subjects:
Online Access:http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf
http://eprints.utm.my/7388/
http://dx.doi.org/10.1007/s001700200107
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_version_ 1845471800874500096
author Fang, Fengzhou Z.
Venkatesh, Vasisht,C.
Zhang, G.X.
author_facet Fang, Fengzhou Z.
Venkatesh, Vasisht,C.
Zhang, G.X.
author_sort Fang, Fengzhou Z.
building UTM Library
collection Institutional Repository
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
continent Asia
country Malaysia
description Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analysed using a Kistler dynamometer and an infrared technique. A zero rake angle cutting tool was found to be most efficient, partly because the effective rake is really a strong negative rake brought about by the peculiar configuration of very low feeds and depths of cut. This is explained by means of the comparison of the force distribution between conventional turning and ultraprecision machining. Atomic force microscopy and scanning electron microscopy were used to study the surfaces. Zinc sulfide gave subnanometric surfaces (0.88 m) and zinc selenide gave Ra values of 2.91 nm.
format Article
id my.utm.eprints-7388
institution Universiti Teknologi Malaysia
language en
publishDate 2002
publisher Springer Verlag
record_format eprints
spelling my.utm.eprints-73882017-10-23T03:50:31Z http://eprints.utm.my/7388/ Diamond turning of soft semiconductors to obtain nanometric mirror surfaces Fang, Fengzhou Z. Venkatesh, Vasisht,C. Zhang, G.X. TP Chemical technology Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analysed using a Kistler dynamometer and an infrared technique. A zero rake angle cutting tool was found to be most efficient, partly because the effective rake is really a strong negative rake brought about by the peculiar configuration of very low feeds and depths of cut. This is explained by means of the comparison of the force distribution between conventional turning and ultraprecision machining. Atomic force microscopy and scanning electron microscopy were used to study the surfaces. Zinc sulfide gave subnanometric surfaces (0.88 m) and zinc selenide gave Ra values of 2.91 nm. Springer Verlag 2002 Article PeerReviewed application/pdf en http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf Fang, Fengzhou Z. and Venkatesh, Vasisht,C. and Zhang, G.X. (2002) Diamond turning of soft semiconductors to obtain nanometric mirror surfaces. International Journal of Advanced Manufacturing Technology, 19 (9). pp. 637-641. ISSN 0268-3768 http://dx.doi.org/10.1007/s001700200107 10.1007/s001700200107
spellingShingle TP Chemical technology
Fang, Fengzhou Z.
Venkatesh, Vasisht,C.
Zhang, G.X.
Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
title Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
title_full Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
title_fullStr Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
title_full_unstemmed Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
title_short Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
title_sort diamond turning of soft semiconductors to obtain nanometric mirror surfaces
topic TP Chemical technology
url http://eprints.utm.my/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf
http://eprints.utm.my/7388/
http://dx.doi.org/10.1007/s001700200107
url_provider http://eprints.utm.my/