Study of macrodroplet and growth mechanisms with and without ion etchings on the properties of TiN coatings deposited on HSS using cathodic arc physical vapour deposition technique
In the present study, titanium nitride (TiN) films were deposited on high-speed steel (HSS) by using cathodic arc physical vapour deposition (CAPVD) technique. The main drawback of this technique, however, is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher mor...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Elsevier B V
2008
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| Online Access: | http://eprints.utm.my/6848/ http://doi.dx.org/10.1016/j.msea.2007.04.030 http://dx.doi.org/10.1016/j.msea.2007.04.030 |
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