Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate

This paper describes about the experience of Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) establishing the Micro Fabrication Cleanroom (MFC). This facility is mainly designed for teaching undergraduate microelectronic course leading to a Bachelor’s degree. With the construction of its “M...

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Bibliographic Details

Main Authors:	Hashim, Uda, Zahid Jamal, Zul Azhar, Phang, K. C., Nurzaihan, Mohamad, Abdul Halim, Nurhamidah, Abd Razak, Haffiz
Format:	Article
Language:	en
Published:	Faculty of Electrical Engineering 2006
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/54/1/paper8dec06.pdf http://eprints.utm.my/54/ http://fke.utm.my/elektrika/dec06/paper8dec06.pdf
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