DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology

The aim of this paper is to study neutron irradiation effects on PMOS capacitors and NMOSFETs transistors. The characterization of induced defects was made by capacitance transients C(t) measurements, DLTS spectroscopy, and optical DLTS (ODLTS). DLTS spectra present three peaks (1, 2, and 3) due to...

Full description

Saved in:
Bibliographic Details
Main Authors: Ahaitouf, Aziz, Bakhtiar, Hazri, Losson, Etienne, Charles, Jean-Pierre
Format: Article
Language:en
Published: Faculty of Science, UTM 2003
Subjects:
Online Access:http://eprints.utm.my/10997/1/HazriBakhtiar2003_DLTSandCtTransientStudy.pdf
http://eprints.utm.my/10997/
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1845472505039421440
author Ahaitouf, Aziz
Bakhtiar, Hazri
Losson, Etienne
Charles, Jean-Pierre
author_facet Ahaitouf, Aziz
Bakhtiar, Hazri
Losson, Etienne
Charles, Jean-Pierre
author_sort Ahaitouf, Aziz
building UTM Library
collection Institutional Repository
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
continent Asia
country Malaysia
description The aim of this paper is to study neutron irradiation effects on PMOS capacitors and NMOSFETs transistors. The characterization of induced defects was made by capacitance transients C(t) measurements, DLTS spectroscopy, and optical DLTS (ODLTS). DLTS spectra present three peaks (1, 2, and 3) due to deep levels created in the semiconductor and two peaks (4 and 5) due to minority carrier generation. Levels 1 and 2 are reported in literature and it was suggested that the level 2 may be due to the divacancy. Two other minority carrier traps have been observed on ODLTS spectra after irradiation. This can explain the decrease of the minority carrier generation lifetime observed in capacitance transients measurements.
format Article
id my.utm.eprints-10997
institution Universiti Teknologi Malaysia
language en
publishDate 2003
publisher Faculty of Science, UTM
record_format eprints
spelling my.utm.eprints-109972010-11-19T02:31:53Z http://eprints.utm.my/10997/ DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology Ahaitouf, Aziz Bakhtiar, Hazri Losson, Etienne Charles, Jean-Pierre QC Physics The aim of this paper is to study neutron irradiation effects on PMOS capacitors and NMOSFETs transistors. The characterization of induced defects was made by capacitance transients C(t) measurements, DLTS spectroscopy, and optical DLTS (ODLTS). DLTS spectra present three peaks (1, 2, and 3) due to deep levels created in the semiconductor and two peaks (4 and 5) due to minority carrier generation. Levels 1 and 2 are reported in literature and it was suggested that the level 2 may be due to the divacancy. Two other minority carrier traps have been observed on ODLTS spectra after irradiation. This can explain the decrease of the minority carrier generation lifetime observed in capacitance transients measurements. Faculty of Science, UTM 2003-08 Article PeerReviewed application/pdf en http://eprints.utm.my/10997/1/HazriBakhtiar2003_DLTSandCtTransientStudy.pdf Ahaitouf, Aziz and Bakhtiar, Hazri and Losson, Etienne and Charles, Jean-Pierre (2003) DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology. Jurnal Fizik UTM, 9 (1). pp. 11-20. ISSN 0128-8644
spellingShingle QC Physics
Ahaitouf, Aziz
Bakhtiar, Hazri
Losson, Etienne
Charles, Jean-Pierre
DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology
title DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology
title_full DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology
title_fullStr DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology
title_full_unstemmed DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology
title_short DLTS and C(t) transient study of defects induced by neutron radiation in MOS structures of CCD technology
title_sort dlts and c(t) transient study of defects induced by neutron radiation in mos structures of ccd technology
topic QC Physics
url http://eprints.utm.my/10997/1/HazriBakhtiar2003_DLTSandCtTransientStudy.pdf
http://eprints.utm.my/10997/
url_provider http://eprints.utm.my/