Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts
This study focused on the effect of laser annealing on Pt/Ag metal contacts deposited on Silicon, (Si) substrates. DC sputtering was used to deposit the metal thin films on the Si. The samples were treated by annealing using pulsed Nd:YAG laser. Then, the samples were characterized based on its morp...
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Science Publishing Corporation
2018
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| Online Access: | http://eprints.uthm.edu.my/5920/ |
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| _version_ | 1833417968681222144 |
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| author | Bhari, Bibi Zulaika Ali, Ahmad Hadi |
| author_facet | Bhari, Bibi Zulaika Ali, Ahmad Hadi |
| author_sort | Bhari, Bibi Zulaika |
| building | UTHM Library |
| collection | Institutional Repository |
| content_provider | Universiti Tun Hussein Onn Malaysia |
| content_source | UTHM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | This study focused on the effect of laser annealing on Pt/Ag metal contacts deposited on Silicon, (Si) substrates. DC sputtering was used to deposit the metal thin films on the Si. The samples were treated by annealing using pulsed Nd:YAG laser. Then, the samples were characterized based on its morphological, optical, structural and electrical properties. From surface morphological, it is clearly shown that the surface roughness of the laser annealed sample is smoother than the as-deposited sample. The calculated energy band gap was obtained as 1.38 eV. For electrical properties, the resistivity for laser anneal was lower compared to as-deposited sample, which are 5.10 × 10-4 ohm-cm and 1.37 × 10-3 ohm-cm respectively. The conductivity increases when the resistivity decreases. |
| format | Article |
| id | my.uthm.eprints-5920 |
| institution | Universiti Tun Hussein Onn Malaysia |
| publishDate | 2018 |
| publisher | Science Publishing Corporation |
| record_format | eprints |
| spelling | my.uthm.eprints-59202022-01-25T00:24:18Z http://eprints.uthm.edu.my/5920/ Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts Bhari, Bibi Zulaika Ali, Ahmad Hadi TP155-156 Chemical engineering This study focused on the effect of laser annealing on Pt/Ag metal contacts deposited on Silicon, (Si) substrates. DC sputtering was used to deposit the metal thin films on the Si. The samples were treated by annealing using pulsed Nd:YAG laser. Then, the samples were characterized based on its morphological, optical, structural and electrical properties. From surface morphological, it is clearly shown that the surface roughness of the laser annealed sample is smoother than the as-deposited sample. The calculated energy band gap was obtained as 1.38 eV. For electrical properties, the resistivity for laser anneal was lower compared to as-deposited sample, which are 5.10 × 10-4 ohm-cm and 1.37 × 10-3 ohm-cm respectively. The conductivity increases when the resistivity decreases. Science Publishing Corporation 2018 Article PeerReviewed Bhari, Bibi Zulaika and Ali, Ahmad Hadi (2018) Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts. International Journal of Engineering & Technology, 7 (4.3). pp. 291-294. ISSN 2227-524X |
| spellingShingle | TP155-156 Chemical engineering Bhari, Bibi Zulaika Ali, Ahmad Hadi Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts |
| title | Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts |
| title_full | Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts |
| title_fullStr | Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts |
| title_full_unstemmed | Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts |
| title_short | Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts |
| title_sort | effects of pulsed nd:yag laser on pt/ag thin film metal contacts |
| topic | TP155-156 Chemical engineering |
| url | http://eprints.uthm.edu.my/5920/ |
| url_provider | http://eprints.uthm.edu.my/ |