Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film
This paper investigated on infrared Nd:YAG pulsed laser radiation on platinum (Pt) thin films. Pt thin films were deposited on Si by DC magnetron sputtering. Then, the deposited thin films were radiated by infrared Nd:YAG pulse laser at different laser energy. The radiated thin films were analysed b...
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2017
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| Online Access: | http://eprints.uthm.edu.my/4191/1/AJ%202017%20%28578%29.pdf http://eprints.uthm.edu.my/4191/ |
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| author | Bhari, Bibi Zulaika Ali, Ahmad Hadi Isiyaku, Aliyu Kabiru Ahmad, Rabiatul Adawiah |
| author_facet | Bhari, Bibi Zulaika Ali, Ahmad Hadi Isiyaku, Aliyu Kabiru Ahmad, Rabiatul Adawiah |
| author_sort | Bhari, Bibi Zulaika |
| building | UTHM Library |
| collection | Institutional Repository |
| content_provider | Universiti Tun Hussein Onn Malaysia |
| content_source | UTHM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | This paper investigated on infrared Nd:YAG pulsed laser radiation on platinum (Pt) thin films. Pt thin films were deposited on Si by DC magnetron sputtering. Then, the deposited thin films were radiated by infrared Nd:YAG pulse laser at different laser energy. The radiated thin films were analysed based on the electrical and surface morphological properties. Four-point probe measurement shows that, the lowest resistivity was recorded when the energy laser are 110-170 mJ. Surface morphology scanned by scanning electron microscope (SEM) revealed that the surface of sample with lowest resistivity after radiated with laser is smoother than the as-deposited thin films. After laser radiation, the grain sizes of thin films increases due to the grain agglomeration on the surface area. |
| format | Article |
| id | my.uthm.eprints-4191 |
| institution | Universiti Tun Hussein Onn Malaysia |
| language | en |
| publishDate | 2017 |
| publisher | UTHM Publisher |
| record_format | eprints |
| spelling | my.uthm.eprints-41912021-11-28T07:09:32Z http://eprints.uthm.edu.my/4191/ Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film Bhari, Bibi Zulaika Ali, Ahmad Hadi Isiyaku, Aliyu Kabiru Ahmad, Rabiatul Adawiah TK7800-8360 Electronics This paper investigated on infrared Nd:YAG pulsed laser radiation on platinum (Pt) thin films. Pt thin films were deposited on Si by DC magnetron sputtering. Then, the deposited thin films were radiated by infrared Nd:YAG pulse laser at different laser energy. The radiated thin films were analysed based on the electrical and surface morphological properties. Four-point probe measurement shows that, the lowest resistivity was recorded when the energy laser are 110-170 mJ. Surface morphology scanned by scanning electron microscope (SEM) revealed that the surface of sample with lowest resistivity after radiated with laser is smoother than the as-deposited thin films. After laser radiation, the grain sizes of thin films increases due to the grain agglomeration on the surface area. UTHM Publisher 2017 Article PeerReviewed text en http://eprints.uthm.edu.my/4191/1/AJ%202017%20%28578%29.pdf Bhari, Bibi Zulaika and Ali, Ahmad Hadi and Isiyaku, Aliyu Kabiru and Ahmad, Rabiatul Adawiah (2017) Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film. Journal of Science and Technology, 9 (3). pp. 83-86. ISSN 2229-8460 |
| spellingShingle | TK7800-8360 Electronics Bhari, Bibi Zulaika Ali, Ahmad Hadi Isiyaku, Aliyu Kabiru Ahmad, Rabiatul Adawiah Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film |
| title | Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film |
| title_full | Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film |
| title_fullStr | Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film |
| title_full_unstemmed | Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film |
| title_short | Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film |
| title_sort | comparative study of infrared nd:yag pulsed laser radiation on pt thin film |
| topic | TK7800-8360 Electronics |
| url | http://eprints.uthm.edu.my/4191/1/AJ%202017%20%28578%29.pdf http://eprints.uthm.edu.my/4191/ |
| url_provider | http://eprints.uthm.edu.my/ |