APA (7th ed.) Citation

Hashim, H., Md Nizam, A. R., Noraiham, M., & Khairul Anuar, A. R. (2013). The Effect of Pulse DC and DC Substrate Bias during In Situ Cleaning PVD Process on Surface Roughness. Elsevier Ltd.

Chicago Style (17th ed.) Citation

Hashim, Hanizam, Abd Rahman Md Nizam, Mohamad Noraiham, and Abd Rahman Khairul Anuar. The Effect of Pulse DC and DC Substrate Bias During In Situ Cleaning PVD Process on Surface Roughness. Elsevier Ltd, 2013.

MLA (9th ed.) Citation

Hashim, Hanizam, et al. The Effect of Pulse DC and DC Substrate Bias During In Situ Cleaning PVD Process on Surface Roughness. Elsevier Ltd, 2013.