Md Fauadi, M. H. F., Ramlan, S., Razali, N., & Hao, X. (2021). Agent-based chemical mechanical planarization qualification for semiconductor wafer fabrication. Penerbit Universiti Teknikal Malaysia Melaka.
Chicago Style (17th ed.) CitationMd Fauadi, Muhammad Hafidz Fazli, Samad Ramlan, N.H Razali, and X. Hao. Agent-based Chemical Mechanical Planarization Qualification for Semiconductor Wafer Fabrication. Penerbit Universiti Teknikal Malaysia Melaka, 2021.
MLA (9th ed.) CitationMd Fauadi, Muhammad Hafidz Fazli, et al. Agent-based Chemical Mechanical Planarization Qualification for Semiconductor Wafer Fabrication. Penerbit Universiti Teknikal Malaysia Melaka, 2021.
Warning: These citations may not always be 100% accurate.