Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching

A silicon substrate consisting of nanoporous silicon film could enhance the thermoelectric performance of bulk silicon due to its low thermal conductivity. Metal-assisted chemical etching (MACE) is a wet method for fabricating diverse nano/micro structures, which uses a noble metal as the catalyst f...

Full description

Bibliographic Details

Main Authors:	Li, Yijie, Toan, Nguyen Van, Wang, Zhuqing, Samat, Khairul Fadzli, Ono, Takahito
Format:	Article
Language:	en
Published:	Institute of Physics Publishing 2020
Online Access:	http://eprints.utem.edu.my/id/eprint/25092/2/2020_4%20THERMOELECTRICAL%20PROPERTIES%20OF%20SILICON%20SUBSTRATES%20WITH.PDF http://eprints.utem.edu.my/id/eprint/25092/ https://iopscience.iop.org/article/10.1088/1361-6528/ab8fe1
Tags:	Add Tag No Tags, Be the first to tag this record!