Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | en |
| Published: |
Trans Tech Publications, Switzerland
2013
|
| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf http://eprints.utem.edu.my/id/eprint/10954/ http://www.scopus.com/results/results.url?sort=plf-f&src=s&st1=z.m.rosli&sid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpVrjSeqQ%3a40&sot=b&sdt=b&sl=22&s=AUTHOR-NAME%28z.m.rosli%29&origin=searchbasic&txGid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpV |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832716541514219520 |
|---|---|
| author | Mohd Rosli, z.m.rosli Kwan, Wai Loon Jariah, Mohamad Juoi Nafarizal , Nayan Zainab , Mahamud Yusliza, Yusuf |
| author_facet | Mohd Rosli, z.m.rosli Kwan, Wai Loon Jariah, Mohamad Juoi Nafarizal , Nayan Zainab , Mahamud Yusliza, Yusuf |
| author_sort | Mohd Rosli, z.m.rosli |
| building | UTEM Library |
| collection | Institutional Repository |
| content_provider | Universiti Teknikal Malaysia Melaka |
| content_source | UTEM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al)N phase was identified. In addition, the existence of BN and TiB2 amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis. Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti,Al)N/a-BN/a-TiB2 nanocomposite. On theother hand, it was found that optimum bias voltage used in present study is -60 V where the deposited TiAlBN coating exhibits an excellent adhesion quality. The adhesion quality of the coatings deposited at -60V bias voltage is classified as HF 1 evaluated using the Rockwell-C adhesion test method (developed by the Union of German Engineers). |
| format | Article |
| id | my.utem.eprints-10954 |
| institution | Universiti Teknikal Malaysia Melaka |
| language | en |
| publishDate | 2013 |
| publisher | Trans Tech Publications, Switzerland |
| record_format | eprints |
| spelling | my.utem.eprints-109542015-05-28T04:14:28Z http://eprints.utem.edu.my/id/eprint/10954/ Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target Mohd Rosli, z.m.rosli Kwan, Wai Loon Jariah, Mohamad Juoi Nafarizal , Nayan Zainab , Mahamud Yusliza, Yusuf Q Science (General) TA Engineering (General). Civil engineering (General) TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al)N phase was identified. In addition, the existence of BN and TiB2 amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis. Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti,Al)N/a-BN/a-TiB2 nanocomposite. On theother hand, it was found that optimum bias voltage used in present study is -60 V where the deposited TiAlBN coating exhibits an excellent adhesion quality. The adhesion quality of the coatings deposited at -60V bias voltage is classified as HF 1 evaluated using the Rockwell-C adhesion test method (developed by the Union of German Engineers). Trans Tech Publications, Switzerland 2013 Article PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf Mohd Rosli, z.m.rosli and Kwan, Wai Loon and Jariah, Mohamad Juoi and Nafarizal , Nayan and Zainab , Mahamud and Yusliza, Yusuf (2013) Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target. Advanced Materials Research, Vol. 626 (2013). pp. 298-301. ISSN 1022-6680 http://www.scopus.com/results/results.url?sort=plf-f&src=s&st1=z.m.rosli&sid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpVrjSeqQ%3a40&sot=b&sdt=b&sl=22&s=AUTHOR-NAME%28z.m.rosli%29&origin=searchbasic&txGid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpV 10.4028/www.scientific.net/AMR.626.298 |
| spellingShingle | Q Science (General) TA Engineering (General). Civil engineering (General) Mohd Rosli, z.m.rosli Kwan, Wai Loon Jariah, Mohamad Juoi Nafarizal , Nayan Zainab , Mahamud Yusliza, Yusuf Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target |
| title | Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed
Target |
| title_full | Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed
Target |
| title_fullStr | Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed
Target |
| title_full_unstemmed | Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed
Target |
| title_short | Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed
Target |
| title_sort | characterization of tialbn nanocomposite coating deposited via radio frequency magnetron sputtering using single hot-pressed
target |
| topic | Q Science (General) TA Engineering (General). Civil engineering (General) |
| url | http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf http://eprints.utem.edu.my/id/eprint/10954/ http://www.scopus.com/results/results.url?sort=plf-f&src=s&st1=z.m.rosli&sid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpVrjSeqQ%3a40&sot=b&sdt=b&sl=22&s=AUTHOR-NAME%28z.m.rosli%29&origin=searchbasic&txGid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpV |
| url_provider | http://eprints.utem.edu.my/ |