Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.
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| Format: | Thesis |
| Language: | en |
| Published: |
2002
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| Online Access: | http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf http://eprints.usm.my/5568/ |
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| _version_ | 1832621992982872064 |
|---|---|
| author | Aw, Kean Chin |
| author_facet | Aw, Kean Chin |
| author_sort | Aw, Kean Chin |
| building | Hamzah Sendut Library |
| collection | Institutional Repository |
| content_provider | Universiti Sains Malaysia |
| content_source | USM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian.
Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. |
| format | Thesis |
| id | my.usm.eprints.5568 |
| institution | Universiti Sains Malaysia |
| language | en |
| publishDate | 2002 |
| record_format | eprints |
| spelling | my.usm.eprints.5568 http://eprints.usm.my/5568/ Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] Aw, Kean Chin QC Physics Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. 2002-11 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf Aw, Kean Chin (2002) Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]. PhD thesis, Universiti Sains Malaysia. |
| spellingShingle | QC Physics Aw, Kean Chin Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_full | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_fullStr | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_full_unstemmed | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_short | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_sort | growth and characterisation of low-k dielectric spin on glass [qc585. a963 2002 f rb] [microfiche 7021] |
| topic | QC Physics |
| url | http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf http://eprints.usm.my/5568/ |
| url_provider | http://eprints.usm.my/ |