Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD

This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase st...

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Main Authors: Siowwoon, Ng, Sau, Siong Tneh, Fong, Kwong Yam, Hassan, Zainuriah
Format: Conference or Workshop Item
Language:en
Published: 2017
Subjects:
Online Access:http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf
http://eprints.usm.my/49005/
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author Siowwoon, Ng
Sau, Siong Tneh
Fong, Kwong Yam
Hassan, Zainuriah
author_facet Siowwoon, Ng
Sau, Siong Tneh
Fong, Kwong Yam
Hassan, Zainuriah
author_sort Siowwoon, Ng
building Hamzah Sendut Library
collection Institutional Repository
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
continent Asia
country Malaysia
description This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination.
format Conference or Workshop Item
id my.usm.eprints.49005
institution Universiti Sains Malaysia
language en
publishDate 2017
record_format eprints
spelling my.usm.eprints.49005 http://eprints.usm.my/49005/ Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah QC1-999 Physics This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination. 2017 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf Siowwoon, Ng and Sau, Siong Tneh and Fong, Kwong Yam and Hassan, Zainuriah (2017) Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD. In: The International Conference of Solid State Science and Technology (ICSSST 2017).
spellingShingle QC1-999 Physics
Siowwoon, Ng
Sau, Siong Tneh
Fong, Kwong Yam
Hassan, Zainuriah
Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
title Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
title_full Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
title_fullStr Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
title_full_unstemmed Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
title_short Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
title_sort optical properties and uv sensing response of nitrogendoped tio2 thin film by cvd
topic QC1-999 Physics
url http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf
http://eprints.usm.my/49005/
url_provider http://eprints.usm.my/