Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates
The optical and electrical properties of indium tin oxide (ITO) thin films grown on soda-lime glass substrates using a radio frequency (RF) magnetron sputtering technique were studied as a function of the sputtering RF power. Fixed 100nm thickness of ITO films were deposited on the soda-lime glass s...
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| Format: | Conference or Workshop Item |
| Language: | en |
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2019
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| Online Access: | http://eprints.usm.my/48849/1/ICoSeMT%202019%20ABSTRACT%20BOOK%20119.pdf http://eprints.usm.my/48849/ |
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| author | Asri, R. I. M. Hamzah, N. A. Ahmad, M. A. Taib, M. Ikram Md Sahil, S. M. S. Hassan, Z. |
| author_facet | Asri, R. I. M. Hamzah, N. A. Ahmad, M. A. Taib, M. Ikram Md Sahil, S. M. S. Hassan, Z. |
| author_sort | Asri, R. I. M. |
| building | Hamzah Sendut Library |
| collection | Institutional Repository |
| content_provider | Universiti Sains Malaysia |
| content_source | USM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | The optical and electrical properties of indium tin oxide (ITO) thin films grown on soda-lime glass substrates using a radio frequency (RF) magnetron sputtering technique were studied as a function of the sputtering RF power. Fixed 100nm thickness of ITO films were deposited on the soda-lime glass substrates at 300°C, using RF powers ranging between 50 to 150W. The optical and electrical properties of the sputtered ITO films were characterized by Ultraviolet–Visible Spectroscopy (UV-Vis), Hall Effect Measurement and Atomic Force Microscope (AFM). Varying the substrate RF sputtering power affected surface roughness, resistivity and transmittance values. |
| format | Conference or Workshop Item |
| id | my.usm.eprints.48849 |
| institution | Universiti Sains Malaysia |
| language | en |
| publishDate | 2019 |
| record_format | eprints |
| spelling | my.usm.eprints.48849 http://eprints.usm.my/48849/ Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates Asri, R. I. M. Hamzah, N. A. Ahmad, M. A. Taib, M. Ikram Md Sahil, S. M. S. Hassan, Z. QC1-999 Physics The optical and electrical properties of indium tin oxide (ITO) thin films grown on soda-lime glass substrates using a radio frequency (RF) magnetron sputtering technique were studied as a function of the sputtering RF power. Fixed 100nm thickness of ITO films were deposited on the soda-lime glass substrates at 300°C, using RF powers ranging between 50 to 150W. The optical and electrical properties of the sputtered ITO films were characterized by Ultraviolet–Visible Spectroscopy (UV-Vis), Hall Effect Measurement and Atomic Force Microscope (AFM). Varying the substrate RF sputtering power affected surface roughness, resistivity and transmittance values. 2019-04-30 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48849/1/ICoSeMT%202019%20ABSTRACT%20BOOK%20119.pdf Asri, R. I. M. and Hamzah, N. A. and Ahmad, M. A. and Taib, M. Ikram Md and Sahil, S. M. S. and Hassan, Z. (2019) Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates. In: International Conference On Semiconductor Materials Technology. |
| spellingShingle | QC1-999 Physics Asri, R. I. M. Hamzah, N. A. Ahmad, M. A. Taib, M. Ikram Md Sahil, S. M. S. Hassan, Z. Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| title | Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| title_full | Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| title_fullStr | Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| title_full_unstemmed | Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| title_short | Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| title_sort | role of rf magnetron sputtering poweronoptical and electrical properties of ito films on soda-lime glass substrates |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/48849/1/ICoSeMT%202019%20ABSTRACT%20BOOK%20119.pdf http://eprints.usm.my/48849/ |
| url_provider | http://eprints.usm.my/ |