Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon

Highly doped n-type porous silicons (PS) were prepared via electrochemical etching. The effect of current density (50 – 300 mA cm-2), etching time (30 – 300 s) and HF concentration (9.2 – 49.0% (v/v)) on the morphology, pore diameter, porosity, surface roughness and electrical properties of the PS w...

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Main Author: Yaakob, Suriani Haji
Format: Thesis
Language:en
Published: 2011
Subjects:
Online Access:http://eprints.usm.my/42764/1/SURIANI_HAJI_YAAKOB.pdf
http://eprints.usm.my/42764/
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author Yaakob, Suriani Haji
author_facet Yaakob, Suriani Haji
author_sort Yaakob, Suriani Haji
building Hamzah Sendut Library
collection Institutional Repository
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
continent Asia
country Malaysia
description Highly doped n-type porous silicons (PS) were prepared via electrochemical etching. The effect of current density (50 – 300 mA cm-2), etching time (30 – 300 s) and HF concentration (9.2 – 49.0% (v/v)) on the morphology, pore diameter, porosity, surface roughness and electrical properties of the PS were studied. These properties were characterized by Scanning Electron Microscopy (SEM), gravimetric method, Atomic Force Microscopy (AFM) and Current-Voltage (I-V) characteristics. The increment in current density has changed the morphology of the PS from interconnected network to columnar with side branching. However, with the increase in the etching time and HF concentration, this disappeared to give smooth side wall pores.
format Thesis
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institution Universiti Sains Malaysia
language en
publishDate 2011
record_format eprints
spelling my.usm.eprints.42764 http://eprints.usm.my/42764/ Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon Yaakob, Suriani Haji QD1-999 Chemistry Highly doped n-type porous silicons (PS) were prepared via electrochemical etching. The effect of current density (50 – 300 mA cm-2), etching time (30 – 300 s) and HF concentration (9.2 – 49.0% (v/v)) on the morphology, pore diameter, porosity, surface roughness and electrical properties of the PS were studied. These properties were characterized by Scanning Electron Microscopy (SEM), gravimetric method, Atomic Force Microscopy (AFM) and Current-Voltage (I-V) characteristics. The increment in current density has changed the morphology of the PS from interconnected network to columnar with side branching. However, with the increase in the etching time and HF concentration, this disappeared to give smooth side wall pores. 2011-07 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/42764/1/SURIANI_HAJI_YAAKOB.pdf Yaakob, Suriani Haji (2011) Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon. Masters thesis, Universiti Sains Malaysia.
spellingShingle QD1-999 Chemistry
Yaakob, Suriani Haji
Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon
title Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon
title_full Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon
title_fullStr Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon
title_full_unstemmed Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon
title_short Effects Of Current Density, Etching Time And Hydrofluoric Acid Concentration On The Formation And Morphology Of Highly Doped N-Type Porous Silicon
title_sort effects of current density, etching time and hydrofluoric acid concentration on the formation and morphology of highly doped n-type porous silicon
topic QD1-999 Chemistry
url http://eprints.usm.my/42764/1/SURIANI_HAJI_YAAKOB.pdf
http://eprints.usm.my/42764/
url_provider http://eprints.usm.my/