Sputter Deposition of Cuprous and Cupric Oxide Thin Films Monitored by Optical Emission Spectroscopy for Gas Sensing Applications

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Bibliographic Details
Main Authors:	Nayan, N, Sandan, MZ, Wei, LJ, Ahmad, MK, Lias, J, Shakaff, AYM, Zakaria, A, Zain, AFM
Format:	Proceedings Paper
Language:	English en_US
Published:	Elsevier Science Bv 2024
Subjects:	Magnetron sputtering plasma Thin film deposition Copper oxide Optical emission sepctroscopy Gas sensor
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