Sputtering thin films: Materials, applications, challenges and future directions
Sputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highl...
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Elsevier B.V.
2025
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| author | Garg R. Gonuguntla S. Sk S. Iqbal M.S. Dada A.O. Pal U. Ahmadipour M. |
| author2 | 57220823468 |
| author_facet | 57220823468 Garg R. Gonuguntla S. Sk S. Iqbal M.S. Dada A.O. Pal U. Ahmadipour M. |
| author_sort | Garg R. |
| building | UNITEN Library |
| collection | Institutional Repository |
| content_provider | Universiti Tenaga Nasional |
| content_source | UNITEN Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | Sputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highlights the renaissance of sputtering as a powerful technology for creating thin films with varied compositions, structures, and properties. For the first time, we have discussed a thorough overview of several sputtered thin film materials based on metal and metal oxide, metal nitride, alloys, carbon, and ceramic-based thin film along with their properties and their applicability in various fields. We further delve into the applications of sputter-coated thin films, specifically emphasizing their relevance in environmental sustainability, energy and electronics, and biomedical fields. We critically examine the recent advancements in developing sputter-coated catalysts for eliminating water pollutants andhydrogen generation. Additionally, the review sheds light on advantages, shortcomings, and future directions for developing sputter-coated thin films utilized in biodegradable metals and alloys with enhanced corrosion resistance and biocompatibility. This review is a comprehensive integration of recent literature, covering diverse sputtering thin film applications. We delve deeply into various material types and emphasize critical analysis of recent advancements, particularly in environmental, energy, and biomedical fields. By offering insights into both advancements and limitations, the review provides a nuanced understanding essential for practical utilization. ? 2023 |
| format | Review |
| id | my.uniten.dspace-36431 |
| institution | Universiti Tenaga Nasional |
| publishDate | 2025 |
| publisher | Elsevier B.V. |
| record_format | dspace |
| spelling | my.uniten.dspace-364312025-03-03T15:42:23Z Sputtering thin films: Materials, applications, challenges and future directions Garg R. Gonuguntla S. Sk S. Iqbal M.S. Dada A.O. Pal U. Ahmadipour M. 57220823468 57208838774 57222470950 57790840800 35224436600 8908351700 55533484700 Biocompatibility Corrosion resistance Corrosion resistant alloys Medical applications Metallic films Sputtering Sustainable development Ultrathin films Water pollution alloy carbon fuel metal oxide Biomedical applications Biomedical fields Composition structure Diverse applications Environmental energy Material application Sputtering Structures and properties Thin film material Thin-films biocompatibility catalyst ceramics corrosion electronics environmental sustainability human nonhuman pharmaceutics pharmacology review sputter deposition water pollutant Fuel cells Sputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highlights the renaissance of sputtering as a powerful technology for creating thin films with varied compositions, structures, and properties. For the first time, we have discussed a thorough overview of several sputtered thin film materials based on metal and metal oxide, metal nitride, alloys, carbon, and ceramic-based thin film along with their properties and their applicability in various fields. We further delve into the applications of sputter-coated thin films, specifically emphasizing their relevance in environmental sustainability, energy and electronics, and biomedical fields. We critically examine the recent advancements in developing sputter-coated catalysts for eliminating water pollutants andhydrogen generation. Additionally, the review sheds light on advantages, shortcomings, and future directions for developing sputter-coated thin films utilized in biodegradable metals and alloys with enhanced corrosion resistance and biocompatibility. This review is a comprehensive integration of recent literature, covering diverse sputtering thin film applications. We delve deeply into various material types and emphasize critical analysis of recent advancements, particularly in environmental, energy, and biomedical fields. By offering insights into both advancements and limitations, the review provides a nuanced understanding essential for practical utilization. ? 2023 Final 2025-03-03T07:42:23Z 2025-03-03T07:42:23Z 2024 Review 10.1016/j.cis.2024.103203 2-s2.0-85194475075 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85194475075&doi=10.1016%2fj.cis.2024.103203&partnerID=40&md5=21123fb651dfcd7a9b62e52e780110b3 https://irepository.uniten.edu.my/handle/123456789/36431 330 103203 Elsevier B.V. Scopus |
| spellingShingle | Biocompatibility Corrosion resistance Corrosion resistant alloys Medical applications Metallic films Sputtering Sustainable development Ultrathin films Water pollution alloy carbon fuel metal oxide Biomedical applications Biomedical fields Composition structure Diverse applications Environmental energy Material application Sputtering Structures and properties Thin film material Thin-films biocompatibility catalyst ceramics corrosion electronics environmental sustainability human nonhuman pharmaceutics pharmacology review sputter deposition water pollutant Fuel cells Garg R. Gonuguntla S. Sk S. Iqbal M.S. Dada A.O. Pal U. Ahmadipour M. Sputtering thin films: Materials, applications, challenges and future directions |
| title | Sputtering thin films: Materials, applications, challenges and future directions |
| title_full | Sputtering thin films: Materials, applications, challenges and future directions |
| title_fullStr | Sputtering thin films: Materials, applications, challenges and future directions |
| title_full_unstemmed | Sputtering thin films: Materials, applications, challenges and future directions |
| title_short | Sputtering thin films: Materials, applications, challenges and future directions |
| title_sort | sputtering thin films: materials, applications, challenges and future directions |
| topic | Biocompatibility Corrosion resistance Corrosion resistant alloys Medical applications Metallic films Sputtering Sustainable development Ultrathin films Water pollution alloy carbon fuel metal oxide Biomedical applications Biomedical fields Composition structure Diverse applications Environmental energy Material application Sputtering Structures and properties Thin film material Thin-films biocompatibility catalyst ceramics corrosion electronics environmental sustainability human nonhuman pharmaceutics pharmacology review sputter deposition water pollutant Fuel cells |
| url_provider | http://dspace.uniten.edu.my/ |