Theoretical modeling and simulation of MEMS piezoelectric energy harvester
Energy harvesting devices, capable of converting wasted ambient energy to electrical power are rapidly gaining popularity as a source of green and renewable energy. This work presents the design and simulation of MEMS based piezoelectric cantilever beam which can both harvest energy as well as monit...
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2023
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| author | Md Ralib A.A. Nordin A.N. Salleh H. |
| author2 | 36537608500 |
| author_facet | 36537608500 Md Ralib A.A. Nordin A.N. Salleh H. |
| author_sort | Md Ralib A.A. |
| building | UNITEN Library |
| collection | Institutional Repository |
| content_provider | Universiti Tenaga Nasional |
| content_source | UNITEN Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | Energy harvesting devices, capable of converting wasted ambient energy to electrical power are rapidly gaining popularity as a source of green and renewable energy. This work presents the design and simulation of MEMS based piezoelectric cantilever beam which can both harvest energy as well as monitor critical vibration frequencies in power plant gas turbines. The design of the energy harvesters consists of a cantilever beam structure with the interdigitated electrodes on the zinc oxide piezoelectric layer with nickel proof mass at the end of the beam. A mechanical finite element simulation was conducted using CoventorWare�. This paper illustrates the proposed theoretical modeling and simulation of piezoelectric energy harvesters. � 2010 IEEE. |
| format | Conference paper |
| id | my.uniten.dspace-30612 |
| institution | Universiti Tenaga Nasional |
| publishDate | 2023 |
| record_format | dspace |
| spelling | my.uniten.dspace-306122023-12-29T15:50:18Z Theoretical modeling and simulation of MEMS piezoelectric energy harvester Md Ralib A.A. Nordin A.N. Salleh H. 36537608500 7005958999 24067645400 Cantilever beam Energy harvesting Piezoelectric Atomic force microscopy Cantilever beams Computer simulation Harvesters Harvesting Nanocantilevers Nickel oxide Piezoelectric devices Piezoelectricity Pile foundations Renewable energy resources Zinc oxide CoventorWare Design and simulation Electrical power Energy Harvester Energy harvesting device Finite element simulations Inter-digitated electrodes Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Proof mass Renewable energies Theoretical modeling Vibration frequency Energy harvesting Energy harvesting devices, capable of converting wasted ambient energy to electrical power are rapidly gaining popularity as a source of green and renewable energy. This work presents the design and simulation of MEMS based piezoelectric cantilever beam which can both harvest energy as well as monitor critical vibration frequencies in power plant gas turbines. The design of the energy harvesters consists of a cantilever beam structure with the interdigitated electrodes on the zinc oxide piezoelectric layer with nickel proof mass at the end of the beam. A mechanical finite element simulation was conducted using CoventorWare�. This paper illustrates the proposed theoretical modeling and simulation of piezoelectric energy harvesters. � 2010 IEEE. Final 2023-12-29T07:50:18Z 2023-12-29T07:50:18Z 2010 Conference paper 10.1109/ICCCE.2010.5556815 2-s2.0-77957783231 https://www.scopus.com/inward/record.uri?eid=2-s2.0-77957783231&doi=10.1109%2fICCCE.2010.5556815&partnerID=40&md5=a6a15f24620218b6b70f2c959bef84c4 https://irepository.uniten.edu.my/handle/123456789/30612 5556815 Scopus |
| spellingShingle | Cantilever beam Energy harvesting Piezoelectric Atomic force microscopy Cantilever beams Computer simulation Harvesters Harvesting Nanocantilevers Nickel oxide Piezoelectric devices Piezoelectricity Pile foundations Renewable energy resources Zinc oxide CoventorWare Design and simulation Electrical power Energy Harvester Energy harvesting device Finite element simulations Inter-digitated electrodes Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Proof mass Renewable energies Theoretical modeling Vibration frequency Energy harvesting Md Ralib A.A. Nordin A.N. Salleh H. Theoretical modeling and simulation of MEMS piezoelectric energy harvester |
| title | Theoretical modeling and simulation of MEMS piezoelectric energy harvester |
| title_full | Theoretical modeling and simulation of MEMS piezoelectric energy harvester |
| title_fullStr | Theoretical modeling and simulation of MEMS piezoelectric energy harvester |
| title_full_unstemmed | Theoretical modeling and simulation of MEMS piezoelectric energy harvester |
| title_short | Theoretical modeling and simulation of MEMS piezoelectric energy harvester |
| title_sort | theoretical modeling and simulation of mems piezoelectric energy harvester |
| topic | Cantilever beam Energy harvesting Piezoelectric Atomic force microscopy Cantilever beams Computer simulation Harvesters Harvesting Nanocantilevers Nickel oxide Piezoelectric devices Piezoelectricity Pile foundations Renewable energy resources Zinc oxide CoventorWare Design and simulation Electrical power Energy Harvester Energy harvesting device Finite element simulations Inter-digitated electrodes Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Proof mass Renewable energies Theoretical modeling Vibration frequency Energy harvesting |
| url_provider | http://dspace.uniten.edu.my/ |