Simulation of a MEMS piezoelectric energy harvester
The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...
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| Format: | Conference paper |
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2023
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| author | Md Ralib A.A. Nurashikin Nordin A. Salleh H. |
| author2 | 36537608500 |
| author_facet | 36537608500 Md Ralib A.A. Nurashikin Nordin A. Salleh H. |
| author_sort | Md Ralib A.A. |
| building | UNITEN Library |
| collection | Institutional Repository |
| content_provider | Universiti Tenaga Nasional |
| content_source | UNITEN Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP. |
| format | Conference paper |
| id | my.uniten.dspace-30554 |
| institution | Universiti Tenaga Nasional |
| publishDate | 2023 |
| record_format | dspace |
| spelling | my.uniten.dspace-305542023-12-29T15:49:24Z Simulation of a MEMS piezoelectric energy harvester Md Ralib A.A. Nurashikin Nordin A. Salleh H. 36537608500 7005958999 24067645400 Cantilever beam Energy harvesting Interdigitated electrodes Piezoelectric Atomic force microscopy Cantilever beams Design Electrodes Harvesters Nanocantilevers Piezoelectricity Pile foundations Platinum Resonance Zinc oxide At resonance Conventional batteries CoventorWare Design and simulation Energy Harvester Environmental-friendly Finite element simulations Growing demand Inter-digitated electrodes Long lasting Optimum dimensions Output voltages Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Portable electronic devices Pt electrode Silicon substrates ZnO Energy harvesting The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP. Final 2023-12-29T07:49:23Z 2023-12-29T07:49:23Z 2010 Conference paper 2-s2.0-77957855178 https://www.scopus.com/inward/record.uri?eid=2-s2.0-77957855178&partnerID=40&md5=52c6285363c04b5b9aca850db03746fb https://irepository.uniten.edu.my/handle/123456789/30554 5486470 177 181 Scopus |
| spellingShingle | Cantilever beam Energy harvesting Interdigitated electrodes Piezoelectric Atomic force microscopy Cantilever beams Design Electrodes Harvesters Nanocantilevers Piezoelectricity Pile foundations Platinum Resonance Zinc oxide At resonance Conventional batteries CoventorWare Design and simulation Energy Harvester Environmental-friendly Finite element simulations Growing demand Inter-digitated electrodes Long lasting Optimum dimensions Output voltages Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Portable electronic devices Pt electrode Silicon substrates ZnO Energy harvesting Md Ralib A.A. Nurashikin Nordin A. Salleh H. Simulation of a MEMS piezoelectric energy harvester |
| title | Simulation of a MEMS piezoelectric energy harvester |
| title_full | Simulation of a MEMS piezoelectric energy harvester |
| title_fullStr | Simulation of a MEMS piezoelectric energy harvester |
| title_full_unstemmed | Simulation of a MEMS piezoelectric energy harvester |
| title_short | Simulation of a MEMS piezoelectric energy harvester |
| title_sort | simulation of a mems piezoelectric energy harvester |
| topic | Cantilever beam Energy harvesting Interdigitated electrodes Piezoelectric Atomic force microscopy Cantilever beams Design Electrodes Harvesters Nanocantilevers Piezoelectricity Pile foundations Platinum Resonance Zinc oxide At resonance Conventional batteries CoventorWare Design and simulation Energy Harvester Environmental-friendly Finite element simulations Growing demand Inter-digitated electrodes Long lasting Optimum dimensions Output voltages Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Portable electronic devices Pt electrode Silicon substrates ZnO Energy harvesting |
| url_provider | http://dspace.uniten.edu.my/ |