Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer
Ablation; CMOS integrated circuits; Composite micromechanics; Copper; Design of experiments; Laser ablation; Laser pulses; Micromachining; Pulse repetition rate; Semiconductor diodes; Semiconductor lasers; Silicon wafers; Solid state lasers; Advanced dicing tehcnology; Laser dicing; Laser grooving;...
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| Format: | Conference Paper |
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Elsevier Ltd
2023
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| _version_ | 1833409707349377024 |
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| author | Shi K.W. Kar Y.B. Talik N.A. Yew L.W. |
| author2 | 35796107300 |
| author_facet | 35796107300 Shi K.W. Kar Y.B. Talik N.A. Yew L.W. |
| author_sort | Shi K.W. |
| building | UNITEN Library |
| collection | Institutional Repository |
| content_provider | Universiti Tenaga Nasional |
| content_source | UNITEN Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | Ablation; CMOS integrated circuits; Composite micromechanics; Copper; Design of experiments; Laser ablation; Laser pulses; Micromachining; Pulse repetition rate; Semiconductor diodes; Semiconductor lasers; Silicon wafers; Solid state lasers; Advanced dicing tehcnology; Laser dicing; Laser grooving; Laser micro-machining; Laser scribing; semicoonductor wafer; Ultra low-k; Ultraviolet lasers |
| format | Conference Paper |
| id | my.uniten.dspace-23445 |
| institution | Universiti Tenaga Nasional |
| publishDate | 2023 |
| publisher | Elsevier Ltd |
| record_format | dspace |
| spelling | my.uniten.dspace-234452023-05-29T14:40:33Z Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer Shi K.W. Kar Y.B. Talik N.A. Yew L.W. 35796107300 26649255900 55576358000 56104265900 Ablation; CMOS integrated circuits; Composite micromechanics; Copper; Design of experiments; Laser ablation; Laser pulses; Micromachining; Pulse repetition rate; Semiconductor diodes; Semiconductor lasers; Silicon wafers; Solid state lasers; Advanced dicing tehcnology; Laser dicing; Laser grooving; Laser micro-machining; Laser scribing; semicoonductor wafer; Ultra low-k; Ultraviolet lasers This paper presents the optimization work of 355 nm ultraviolet (UV) laser diode ablation process for CMOS 45 nm Copper (Cu) low-k semiconductor wafer. The micromachining parameters included laser power, laser frequency, feed speed, and defocus amount were optimized via design of experiment (DOE). Package reliability stressing tests were carried out as part of the efforts to validate the robustness. The results show that high repetition rate, low laser pulse energy and a high pulse overlap produced zero dicing defects. The laser groove depth increased as the laser pulse energy increased. It is shown that, laser grooving is one of the best solutions to choose for dicing quality, throughput and yield improvements for CMOS 45 nm Cu low-k wafer dicing. � 2017 The Authors. Published by Elsevier Ltd. Final 2023-05-29T06:40:33Z 2023-05-29T06:40:33Z 2017 Conference Paper 10.1016/j.proeng.2017.04.106 2-s2.0-85019716403 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85019716403&doi=10.1016%2fj.proeng.2017.04.106&partnerID=40&md5=be4cf7e4b766be6d405f9d7e36c10d31 https://irepository.uniten.edu.my/handle/123456789/23445 184 360 369 All Open Access, Gold Elsevier Ltd Scopus |
| spellingShingle | Shi K.W. Kar Y.B. Talik N.A. Yew L.W. Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer |
| title | Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer |
| title_full | Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer |
| title_fullStr | Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer |
| title_full_unstemmed | Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer |
| title_short | Ultraviolet Laser Diode Ablation Process for CMOS 45 nm Copper Low-K Semiconductor Wafer |
| title_sort | ultraviolet laser diode ablation process for cmos 45 nm copper low-k semiconductor wafer |
| url_provider | http://dspace.uniten.edu.my/ |